Unformatted text preview: The course shall be graded as follows: Final Exam (30 %) Mid-Term Exam (25 %) Term Paper (20 %) [Choose from topics in separate handout.] Homework Problems (25%) [Homework will consist of ~ bi-weekly assignments.] Reading Material VLSI FABRICATION PRINCIPLES (2ND), by S.K. Ghandhi Handouts Subjects (in approximate order of course presentation, G# refers to the chapter in Ghandhi) Historical and scientific background (G1, handouts) Phase Diagrams, Structure and Electronic Properties (G2) Bulk Crystal Growth (G3) Impurities and Diffusion (G4) Implantation (G6) Oxidation (G7) Epitaxy (Physical Deposition) (G5) Epitaxy (Chemical Deposition) (G5) Lithography, Metallization, and Device Fabrication (G10,G11)...
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- Winter '11
- Materials Science, Semiconductor device fabrication, Chemical vapor deposition, Wafer, Electronic Materials Processing