This preview shows page 1. Sign up to view the full content.
Unformatted text preview: The course shall be graded as follows: Final Exam (30 %) Mid-Term Exam (25 %) Term Paper (20 %) [Choose from topics in separate handout.] Homework Problems (25%) [Homework will consist of ~ bi-weekly assignments.] Reading Material VLSI FABRICATION PRINCIPLES (2ND), by S.K. Ghandhi Handouts Subjects (in approximate order of course presentation, G# refers to the chapter in Ghandhi) Historical and scientific background (G1, handouts) Phase Diagrams, Structure and Electronic Properties (G2) Bulk Crystal Growth (G3) Impurities and Diffusion (G4) Implantation (G6) Oxidation (G7) Epitaxy (Physical Deposition) (G5) Epitaxy (Chemical Deposition) (G5) Lithography, Metallization, and Device Fabrication (G10,G11)...
View Full Document
This note was uploaded on 01/20/2012 for the course MAT SCI 122 taught by Professor Goorsky during the Winter '11 term at UCLA.
- Winter '11