121L_Syllabus_2011 Goorsky

121L_Syllabus_2011 Goorsky - Reading Materials VLSI...

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Department of Materials Science and Engineering School of Engineering and Applied Science University of California, Los Angeles Materials Science of Semiconductors Laboratory MSE 121L Spring 2011 Instructor: Dr. Mark S. Goorsky Teaching Assistants: David Fong Mike Jackson T.A. Office: 3122E EngV / 3020 EngV , (310) 825-8603 Email: [email protected], [email protected], Course Description Design, fabrication and characterization of micro-mechanical and micro- electronic devices. Students perform various processing tasks such as etching, layer deposition, ion implantation, metallization, and photolithography. Laboratories include fabrication of a simple MEMS structures on Silicon and a metal semiconductor field effect transistor (MESFET) on GaAs, as well as characterization of these structures to determine important materials science issues. Course Grade Distribution 30% class participation and attendance. 60% lab reports (30% each) 10% fabrication proposal presentation (in groups)
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Unformatted text preview: Reading Materials VLSI Fabrication principles by Sorab K. Gandhi. Book from MSE 122 Students will be supplied with handouts for background Further reading material: Microfabrication by Sami Franssila Introduction to Microelectronic Fabrication by Richard Jaeger Meeting Dates Lecture Topic Lab Activity 1) 30 th / April 1 Safety / Introduction Lab Tour / Equipment Check 2) April 6/8 Layer Deposition Gowning, color inspection 3) April 13/15 Lithography Window PR patterning 4) April 20/22 Chemical Etching RIE and KOH etching 5) April 27/29 Lab Write-up guide Membrane inspection 6) May 4/6 Transistors Gate Alignment (Lab 1 due) 7) May 11/13 Ion Implantation S/D Alignment 8) May 18/20 Metal Contacts Contacts PR/Term Project work Possible extra credit patterning session for AuGe contacts 9) May 25/27 Vacuum systems Metal deposition, Lift-off 10) June 1/3 (Last day) IV Curves / present proposals (Lab 2 due Friday June 10th, 5pm)...
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