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Unformatted text preview: Reading Materials VLSI Fabrication principles by Sorab K. Gandhi. Book from MSE 122 Students will be supplied with handouts for background Further reading material: Microfabrication by Sami Franssila Introduction to Microelectronic Fabrication by Richard Jaeger Meeting Dates Lecture Topic Lab Activity 1) 30 th / April 1 Safety / Introduction Lab Tour / Equipment Check 2) April 6/8 Layer Deposition Gowning, color inspection 3) April 13/15 Lithography Window PR patterning 4) April 20/22 Chemical Etching RIE and KOH etching 5) April 27/29 Lab Write-up guide Membrane inspection 6) May 4/6 Transistors Gate Alignment (Lab 1 due) 7) May 11/13 Ion Implantation S/D Alignment 8) May 18/20 Metal Contacts Contacts PR/Term Project work Possible extra credit patterning session for AuGe contacts 9) May 25/27 Vacuum systems Metal deposition, Lift-off 10) June 1/3 (Last day) IV Curves / present proposals (Lab 2 due Friday June 10th, 5pm)...
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- Spring '11