EE 330 Lect 10 Fall 2011

EE 330 Lect 10 Fall 2011 - EE 330 Lecture 10 IC Fabrication...

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EE 330 Lecture 10 IC Fabrication Technology Part III - Epitaxy - Polysilicon - Interconnects - Back-end Processes
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IC Fabrication Technology Crystal Preparation Masking Photolithographic Process Deposition Implantation Etching Diffusion Oxidation Epitaxy Polysilicon Contacts, Interconnect and Metalization Planarization Review from Last Time
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Etching Selective Removal of Unwanted Materials Wet Etch Inexpensive but under-cutting a problem Dry Etch Often termed ion etch or plasma etch Review from Last Time
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