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Unformatted text preview: 1 MECE 4212 - MEMS Midterm – Fall 2010 November 3 rd 2010, 2:30 – 4 pm in 227 Mudd Section I---Short paragraph answers [100 total points: 30-45 minutes] Please provide short paragraph answers for the questions in this section. Also, use math and sketches where needed. Keep your answers clear and concise. Spend no more than 45 minutes in this Section! 1. [ 10 points ] Use scaling arguments to explain why, in principle, a miniature MEMS proof mass accelerometer is better than a macroscopic one of the same design for airbag applications? 2. [ 15 points ] Describe and contrast the deposition of silicon oxide using: (1) plasma enhanced chemical vapor deposition, (2) sputtering, and (3) evaporation. 3. [ 20 points ] An electrostatically actuated cantilever mirror device is observed to “snap down” to the substrate beyond a threshold voltage applied between the cantilever and the substrate. Describe the electrostatics process and explain why this happens....
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This note was uploaded on 02/05/2012 for the course APMAE 4200 taught by Professor R during the Fall '11 term at Columbia.
- Fall '11