01_Intro=) - MS3002 Advanced Materials Processing Lecturer:...

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MS3002 Advanced Materials Processing Lecturer: Asst. Prof. Zhang Hua (Email: [email protected] , Tel: 6790-5175, Office: N4.1-2-25) Assoc. Prof. Gan Chee Lip (Email: [email protected] , Tel : 6790-6821, Office: N4.1-1-21) ecture: uesday 9 30am 1 30am LT6 Lecture: Tuesday, 9.30am – 11.30am, LT6 & Wednesday, 10.30am – 11.30am, LT6 utor: r im heng ang (Email [email protected] ntu edu sg Tutor: Mr Lim Zheng Bang (Email: [email protected] ) Tutorial: Thursday, 9.30am, TR23 (T4) or Thursday, 10.30am, TR23 (T5) or Thursday, 1.30pm, TR23 (T5) or Friday, 11.30am, TR26 (T1) or Friday,12.30pm, TR26 (T2) Exam: 6 May 2011 (Friday), 2.30pm (Gan 2010/11)
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MS3002 Course Outline (Gan) A. Introduction - overview of microelectronics unit processes B. Semiconductor physics - carrier transport, p-n junction, MOS-C, MOSFET C. Bulk crystal growth - wafer preparation, Czochralski crystal growth D. Planar processes - diffusion, ion implantation, oxidation E. Film deposition techniques - chemical vapour deposition (Gan 2010/11) For complete lecture schedule, check file on course website.
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MS3002 Course Structure (Gan) Tutorials 4 Class Tutorials 1 Lab Tutorial (Simulation) -17 th –18 th February - E-Space (Computer Lab, N4.1-B2-01) rading Gad g 1. Final Examination 2. Continuous Assessment: Simulation Assignment - Group work (Gan) • due 21 st March (Monday), 11.59pm -> submit online (Gan 2010/11)
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Reference (Text) Books J. D. Plummer, M. D. Deal and P. B. Griffin, Silicon VLSI Technology , 2000, Prentice Hall. . M. Sze, emiconductor Devices (Physics and Technology) John S. M. Sze, Semiconductor Devices (Physics and Technology) , John Wiley & Sons, 2002, 2nd edition S. Campbell, The Science & Engineering of Microelectronic Fabrication , 1996, Oxford. S. M. Sze, VLSI Technology, VLSI Technology , 1988, McGraw Hill. Y. Chang and S. M. Sze, ULSI Technology , 1996, McGraw Hill. . K. Ghandhi, LSI Fabrication Principles 1994, John Wiley. S. K. Ghandhi, VLSI Fabrication Principles , 1994, John Wiley. H. H. Lee, Fundamentals of Microelectronics Processing , 1990, McGraw Hill. Reference Video (Gan 2010/11) • Silicon Run (B504792)
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Microelectronic Products Semiconductor devices control their operation XBox PDA o P3 ard Disk MP3 andphone Laptop Hard Disk Handphone (Gan 2010/11)
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History 1939 1959 Brittan & Schockley propose a semiconductor amplifier of - First patent
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This note was uploaded on 02/21/2012 for the course MSE MS3002 taught by Professor Gancheelip during the Spring '12 term at Nanyang Technological University.

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01_Intro=) - MS3002 Advanced Materials Processing Lecturer:...

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