12tinyprod_6_f_2 - Pressure sensor Surface Micromachining...

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6 2.008-spring-2003 Pressure sensor 2.008-spring-2003 Surface Micromachining Deposit sacrificial layer Pattern anchors Deposit/pattern structural layer Etch sacrificial layer Si PSG By HF Poly by XeF2 2.008-spring-2003 Surface micromachining Structure sacrificial etchant Polysilicon Silicon dioxide HF SiNx PSG HF Silicon dioxide polysilicon XeF2 SiNx polysilicon XeF2 Aluminum photoresist oxygen plasma 2.008-spring-2003 Residual stress gradients More tensile on top More compressive on top Just right! 2.008-spring-2003 Clean Room Gowning with bunny suit Class 1, 10, 100 A salt grain on a chip 2.008-spring-2003 Class of clean rooms Class 1 means one speckle of 0.5 µ partical in one ft 3 . Class 10, 100, 1000 HEPA filter, AHU
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7 2.008-spring-2003 Air Filters HEPA (High Efficiency Particulate Air) filters High efficiency, low p, good loading characteristics Glass fibers in a paper like medium 97% retainment of incident particles of 0.3 µ m or larger 2.008-spring-2003 Class of clean rooms $10,000 +/- 2% +/- 0.3 o F 1 1 $3500 +/- 3% +/- 0.5 o F 10 10 $1200 +/- 5% +/- 1 o F 100 100 $350-400 +/- 5% +/- 2 o F 1,000 1,000 $250-300 +/- 5% +/- 3 o F 10,000 10,000 $/ft 2 RH tolerance Temp tolerance 0.5 µ particle Class 2.008-spring-2003 Particles 7 1000 N/A N/A N/A 1000 N/A 100 300 750 N/A 100 N/A 10 30 75 350 10 N/A 1 3 7.5 35 1 5.0 µ 0.5 µ 0.3 µ 0.2 µ 0.1 µ class
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