chapter1-introduction03

chapter1-introduction03 - 1.Introduction If the automobile...

Info iconThis preview shows pages 1–10. Sign up to view the full content.

View Full Document Right Arrow Icon
Digital IC Introduction 1.Introduction If the automobile had followed the same development cycle as the computer, a Rolls- Royce would today cost $100, get one million miles to the gallon and explode once a year
Background image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Digital IC Stages of IC Fabrication Wafer preparation Wafer fabrication Wafer test/sort Assembly and packaging Final test 2
Background image of page 2
Digital IC The Manufacturing Process For a great tour through the IC manufacturing process and its different steps, check http://www.fullman.com/semiconductors/semiconductors.html 3 0: Introduction
Background image of page 3

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Digital IC Stages of IC Fabrication Wafer Preparation includes crystal growing, rounding, slicing and polishing. Wafer Fabrication includes cleaning, layering, patterning, etching and doping. Assembly and Packaging: The wafer is cut along scribe lines to separate each die. Metal connections are made and the chip is encapsulated. Test/Sort includes probing, testing and sorting of each die on the wafer. Final Test ensures IC passes electrical and environmental testing. Defective die 1. 2. 3. Scribe line A single die Assembly Packaging 4. 5. Wafers sliced from ingot Single crystal silicon Figure 1.6 4 0: Introduction
Background image of page 4
Digital IC Preparation of Silicon Wafers 1. Crystal Growth 3. Crystal Trimming and Diameter Grind 4. Flat Grinding 5. Wafer Slicing 6. Edge Rounding 7. Lapping 8. Wafer Etching 9. Polishong 10. Wafer Inspection Slurr y Polishing table Polishing head Polysilicon Seed crystal Heater Crucible 5 0: Introduction
Background image of page 5

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Digital IC Photo-Lithographic Process oxidation optical mask process step photoresist coating photoresist removal (ashing) spin, rinse, dry acid etch photoresist stepper exposure development Typical operations in a single photolithographic cycle (from [Fullman]). 6 0: Introduction
Background image of page 6
Digital IC Major Fabrication Steps in MOS Process Flow Oxidation (Field oxide) Silicon substrate Silicon dioxide oxygen Photoresist Develop oxide Photoresist Coating photoresist Mask-Wafer Alignment and Exposure Mask UV light Exposed Photoresist exposed photoresist G S D Active Regions top nitride S D G silicon nitride Nitride Deposition Contact holes S D G Contact Etch Ion Implantation ox D G Scanning ion beam S Metal Deposition and Etch drain S D G Metal contacts Polysilicon Deposition polysilicon Silane gas Dopant gas Oxidation (Gate oxide) gate oxide oxygen Photoresist Strip oxide Ionized oxygen gas Oxide Etch photoresist oxide Ionized CF 4 gas Polysilicon Mask and Etch oxide Ionized CCl 4 gas 7 0: Introduction
Background image of page 7

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Digital IC CMOS Process Flow Overview of Areas in a Wafer Fab • Photolithography • Diffusion • Ion Implant • Polish • Etch • Thin Films 8/111 0: Introduction
Background image of page 8
Digital IC Negative Lithography Ultraviolet light Island Areas exposed to light become crosslinked and resist the developer chemical.
Background image of page 9

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Image of page 10
This is the end of the preview. Sign up to access the rest of the document.

Page1 / 77

chapter1-introduction03 - 1.Introduction If the automobile...

This preview shows document pages 1 - 10. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online