143f2010-01 - N.CHEUNG EE143 Fall 2010 Homework Assignment#1(Due Sept 10 9am Homework hardcopy can be left in EE143 DROP BOX Moore Room Cory Hall

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N.CHEUNG EE143, Fall 2010 Homework Assignment #1 (Due Sept 10, 9am ) Homework hardcopy can be left in EE143 DROP BOX , Moore Room, Cory Hall Electronic submission can be done via BSpace in the Assignment Directory Required Reading 1) Chapter 1 of Jaeger 2) Lecture Notes 1, 2 ,3 3) Overview of pn diode and CMOS process flows http://jas.eng.buffalo.edu/education/fab/pn/diodeframe.html http://jas.eng.buffalo.edu/education/fab/invFab/index.html Suggested Reading For students who needs reinforcement on semiconductor devices (semiconductors, diodes, and transistors), they are encouraged to read a quick IC Devices Review http://www-inst.eecs.berkeley.edu/~ee143/fa10/handouts/IC_devices.pdf Problem 1 Getting acquainted with Microfabrication Terminologies Use sketches to illustrate your answer if you find it more convenient. . (a) Growing the oxide SiO 2 is not the same as Depositing the oxide SiO 2 . (i) What processing step is used to “Grow” an oxide on a Si wafer ? (ii) What processing step is used to “Deposit” an oxide on a Si wafer ?
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This note was uploaded on 03/03/2012 for the course EECS 142 taught by Professor Ee142 during the Spring '04 term at University of California, Berkeley.

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143f2010-01 - N.CHEUNG EE143 Fall 2010 Homework Assignment#1(Due Sept 10 9am Homework hardcopy can be left in EE143 DROP BOX Moore Room Cory Hall

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