143f2010-06

143f2010-06 - N.CHEUNG EE143, Fall 2010 Homework Assignment...

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N.CHEUNG EE143, Fall 2010 Homework Assignment # 6 (Due October 15, Fri 9am) Reading Assignment Chapter 6 of Jaeger ( Sections 6.4.2 and 6.4.3 are not required) EE143 website Handouts Directory - EE143 Notes on CVD Kinetic BSpace- Qualitative reading only-Chapter 13 of Campbell on CVD.You can skip Section 13.2 Optional for those who want to explore further BSpace- “A Short course on Vacuum Pump Technology” Problem 1 Thickness Uniformity and Step Coverage From most textbooks, one can derive that a small-area cos emission cource and a spherical receiving surface ( see figure below), will give a constant deposited thickness for all values of r from the emission source. (i) Suppose the small-area source actually have a (cos ) 2 flux emission dependence instead of cos . How will the thickness deposited depend on r ? Show your derivation. (ii) Using the above geometry to deposit thin films over contact holes or across steps on the wafers, do you still expect to see step coverage problems . Explain.
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143f2010-06 - N.CHEUNG EE143, Fall 2010 Homework Assignment...

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