143f2010-08 - N.CHEUNG EE143, Fall 2010 Homework Assignment...

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N.CHEUNG EE143, Fall 2010 Homework Assignment # 8 (Due Oct 29, Friday 9am) Reading Assignment Introduction: Chapter 7 of Jaeger on Interconnect and contacts Section 3.8.2 of Jaege -.Brief description of CMP Reprint: Chapter 15 Campbell on metallization [You can skip sections 15.1 and 15.5 ] Problem 1 RC Time constant Aluminum-copper-silicon alloy has a resistivity of 3.2 ohm-cm. (a) What is the sheet resistance of a 1- m-thick film. (b) What would be the resistance of a line 500 m long and 10 m wide? (c) What is the capacitance of this line to another parallel identical line separated by 1 m of SiO2 ? Relative permittivity of SiO2 is 3.9. (d) What is the RC time constant associated with this 500 m-long line? (e) If the oxide is replace by a gap filled with air ( relatively permittivity =1), what is the new RC time constant ? Problem 2 Electromigration failure a) Electromigration failure time depend exponentially on 1/temperature.
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This note was uploaded on 03/03/2012 for the course EECS 142 taught by Professor Ee142 during the Spring '04 term at University of California, Berkeley.

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143f2010-08 - N.CHEUNG EE143, Fall 2010 Homework Assignment...

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