143s2006-m2 - Spring 2006 UNIVERSITY OF CALIFORNIA College...

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1 Spring 2006 UNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences EE143 Midterm Exam #2 Family Name _______________________ First name_________________SID___________________ Signature______________________________________________________________ Make sure the exam paper has 7 pages total (including cover page) Instructions: DO ALL WORK ON EXAM PAGES This is a 90-minute exam (8 sheets of HANDWRITTEN notes allowed) Grading: The reader can only assess what you put down on the exam paper, not what is inside your brain. Please be concise with your answers. For answers requiring explanation, adding sketches can be very effective. To obtain full credit, show correct units and algebraic sign. Numerical answers orders of magnitude off will receive no partial credit. Problem 1 (25 points)________________ Problem 2 (25 points)_______________ Problem 3 (25 points) ________________ Problem 4 (25 points) ________________ TOTAL (100 points) __________________
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2 Problem 1 Lithography (25 points total) (a) An optical stepper using G-line illumination ( λ =436 nm) and NA=07 can produce a minimum printable feature l m of 0.5 μ m with a Depth of Focus of 1 μ m. The stepper is modified by changing the light source wavelength to 365nm (I-line) and by placing an aperture before the lens to reduce NA to 0.5. λ NA Old Stepper 436 nm 0.7 Modified stepper 365 nm 0.5 With the lithography technology factors being the same, (i) (4 points) Calculate the new l m (ii) (4 points) Calculate the new DOF (b) (8 points) With an 1X optical stepper, at lithography step #1, alignment marks are transferred to edge of the 100mm-diameter wafer with mask temperature at 22 o C and wafer temperature at 24 o C. At lithography steps #2, mask temperature is at 24 o C and wafer temperature is at 22 o C. Calculate the thermal run-out (or run-in) error in microns for the alignment marks at lithography Step #2.
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This note was uploaded on 03/03/2012 for the course EECS 142 taught by Professor Ee142 during the Spring '04 term at University of California, Berkeley.

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143s2006-m2 - Spring 2006 UNIVERSITY OF CALIFORNIA College...

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