Lec_05

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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 1 Optical Proximity Correction *Auxiliary features added on mask Mask Wafer
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 2 Overlay Errors + + + + Alignment marks from previous masking level wafer alignment mask photomask plate
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 3 (1) Thermal run-in/run-out errors si si m m T T r R T Tsi changeof mask and wafer temp coefficient of thermal expansionof mask &Si m m si , . , run-out error wafer radius
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 4 run-out (2) Translational Error referrer image n + Al p
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 5 (3) Rotational Error
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 6
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 7 Characterization of Overlay Errors + + + + L T B R wafer O O O O + R O O =optical image + =alignment marks on wafer y x C
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 8 m T R C L B x 0.0 0.7 0.5 0.3 1.0 y 0.7 1.0 0.5 0.0 0.3 * Center of wafer has only translation error T error = (0.5, 0.5) After subtracting T error , Example
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 9 T R C L B x -0.5 0.2 0 -0.2 0.5 y 0.2 0.5 0 -0.5 -0.2 T B R wafer y x L 0.5 0.2
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 10 radians error Rotational cm D is diameter wafer If clockwise] [counter m error Rotational m error out Run 5 10 10 " 4 5 . 0 2 . 0 R y
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 11 Reference marks on wafer Optical image of mask alignment marks With thermal run-out, the alignment error is 1/2 of the image/reference difference [best scenario]
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 12 Total Overlay Tolerance 2 2 total i i i = std. deviation of overlay error for i th masking step total = std. deviation for total overlay error Layout design-rule specification should be > total
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Professor N. Cheung, U.C. Berkeley Lecture 5 EE143 F2010 13 Example: Contact to source/drain of MOSFET.
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