midterm2_review - Professor N Cheung, U.C. Berkeley Review...

Info iconThis preview shows pages 1–6. Sign up to view the full content.

View Full Document Right Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: Professor N Cheung, U.C. Berkeley Review 2 EE143 S06 1 H Evaporation Source Wafer Area=A a Emission flux (cos ) n Deposited thickness not uniform across wafer Professor N Cheung, U.C. Berkeley Review 2 EE143 S06 2 Evaporation Sputtering substrate substrate photo resist photo resist deposited film deposited film Step coverage problem is not the same as thickness nonuniformity problem Professor N Cheung, U.C. Berkeley Review 2 EE143 S06 3 Thermal Oxidation Model C G C s C o C i X 0x stagnant layer SiO 2 Si F 1 F 2 F 3 gas transport flux diffusion flux through SiO 2 reaction flux at interface Note C s C o Professor N Cheung, U.C. Berkeley Review 2 EE143 S06 4 CVD Deposition Rate [Grove Model by setting Xox =0] F F = = 3 1 kT E o s G e k k h D = = F 1 F 3 Si film = thickness of stagnant layer 3 1 F F = D [ C G- C S ] / k S C S Professor N Cheung, U.C. Berkeley Review 2 EE143 S06 5 ks depends only on temperature h G depends on temperature, pressure and flow velocity h G reduced ks h G Professor...
View Full Document

This note was uploaded on 03/03/2012 for the course EECS 142 taught by Professor Ee142 during the Spring '04 term at University of California, Berkeley.

Page1 / 15

midterm2_review - Professor N Cheung, U.C. Berkeley Review...

This preview shows document pages 1 - 6. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online