9801017v1 - arXiv:cond-mat/9801017v1 [cond-mat.mtrl-sci] 5...

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Unformatted text preview: arXiv:cond-mat/9801017v1 [cond-mat.mtrl-sci] 5 Jan 1998 IPM-97-261 Diamond-Like Carbon film from Liquid Gas on Metallic Substrates M.A. Vesaghi a ∗ and A. Shafiekhani b † a Dept. of Physics, Sharif University of Technology, P.O.Box: 9161, Tehran 11365, Iran b Institute for Studies in Theoretical Physics and Mathematics P.O.Box: 5531, Tehran 19395, Iran Abstract Liquid gas was used to produce DLC films on Cu, Al and steel sub- strates by DC plasma technique. The absorption in IR reflectance indi- cates, grown films are DLC. By deconvolution of room temperature UV- visible spectra of the films grown at 50 mtorr and 200 ◦ C, in addition to the spectra lines reported for CL, PL, PLC and ESR, some new spectra lines were obtained. We also, have seen exciton absorption line at room temperature. PACS number: 71.35.C, 78.40, 81.05.T, 78.66, 61.72.J Typeset using REVT E X ∗ e-mail address: vesaghi@physic.sharif.ac.ir † e-mail address: ashafie@theory.ipm.ac.ir 1 In the last two decade the interest on diamond-like carbon (DLC) and hydrogenated amorphous carbon (a-C:H) films have grown enormously due to their particular and useful properties such as wide band gap, high thermal conductivity, high hardness and various preparation techniques available. However, there are some technical difficulties in prepara- tion and characterization. Various physical and chemical techniques such as, sputtering [1], pulsed laser [2], radio frequency (rf) [3], electrolysis [4], microwave enhanced [5,6], plasma beam [7], hot filament [8], direct current (dc) discharge plasma [9], were used to make DLC and a-C:H films. The gases which are used in most of these deposition methods are C 2 H 2 , CH 4 and C 2 H 6 pure or mixed with hydrogen. In all these techniques neutral or ionized atoms of carbon or various hydrocarbon precursor ions have been produced. These species with free (dangling) hand reach substrate, and those with sufficient time and energy stick to substrate and to each other. It is now well understood that films deposited by these techniques are amorphous or diamond-like carbon with no-long range order in structure. Because of the non-equilibrium nature of the growth, there must be some vacancies in these films [5]. These vacanciesnature of the growth, there must be some vacancies in these films [5]....
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9801017v1 - arXiv:cond-mat/9801017v1 [cond-mat.mtrl-sci] 5...

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