kitagawa01 - (BL8B1) Characterization of the diamond-like...

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(BL8B1) Characterization of the diamond-like carbon films formed by Ar gas cluster ion beam assisted deposition Teruyuki Kitagawa 1 , Kazuhiro Kanda 2 , Yutaka Shimizugawa 2 , Yuichi Haruyama 2 ,Shinji Matsui 2 , Mititaka Terasawa 1 , Harushige Tsubakino 1 , Isao Yamada 2,3 ,Tatsuo Gejo 4 and Masao Kamada 4 1 Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo, Japan 2 Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo, Japan 3 Collaborative Research Center for Cluster Ion Beam Process Technology, Kyoto University, Sakyo, Kyoto, Japan 4 Institute for Molecular Science, Okazaki, Aichi, Japan. Diamond-like carbon (DLC) films have been very interesting material in view of their numerous applications because of their high hardness, low friction coefficient and chemical inertness. DLC films have been dominantly formed by vapor phase methods [1,2], however their properties are not sufficient for the various devices in the next generation. In order to improve the quality of DLC film, our group has proposed a novel method in DLC synthesis using gas cluster ion beam [3]. The DLC films were formed by irradiating Ar cluster ion beam during evaporation of C 60 as a carbon source. The films by this method exhibited good properties of hardness, adhesion and wear resistance. Electronic and structural properties of amorphous carbon films are related to the coordination of the carbon atoms. The DLC films mainly consist of two phase of carbon bonding. One of them is sp 2 hybridized orbital and other is sp 3 hybridized orbital. The content ratio of these phases
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This note was uploaded on 03/18/2012 for the course PHYSICS 303 taught by Professor Ihn during the Spring '12 term at Swiss Federal Institute of Technology Zurich.

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kitagawa01 - (BL8B1) Characterization of the diamond-like...

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