Characterization of the diamond-like carbon films formed by
Ar gas cluster ion beam assisted deposition
, Kazuhiro Kanda
, Yutaka Shimizugawa
, Yuichi Haruyama
, Mititaka Terasawa
, Isao Yamada
and Masao Kamada
Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo, Japan
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo, Japan
Collaborative Research Center for Cluster Ion Beam Process Technology, Kyoto University, Sakyo, Kyoto, Japan
Institute for Molecular Science, Okazaki, Aichi, Japan.
Diamond-like carbon (DLC) films have been very interesting material in view of their numerous applications because of
their high hardness, low friction coefficient and chemical inertness.
DLC films have been dominantly formed by vapor
phase methods [1,2], however their properties are not sufficient for the various devices in the next generation.
In order to
improve the quality of DLC film, our group has proposed a novel method in DLC synthesis using gas cluster ion beam .
The DLC films were formed by irradiating Ar cluster ion beam during evaporation of C
as a carbon source. The films by this
method exhibited good properties of hardness, adhesion and wear resistance. Electronic and structural properties of
films are related to the coordination of the carbon atoms.
The DLC films mainly consist of two phase
of carbon bonding.
One of them is
hybridized orbital and other is
hybridized orbital. The content ratio of these phases