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Unformatted text preview: 19 2002 ME Graduate Student Conference April 13, 2002 SYNTHESIS, PROPERTIES AND CHARACTERIZATION OF CR-DLC NANOCOMPOSITE FILMS Varshni Singh Ph.D. Candidate Faculty Advior: Dr E.I. Meletis ABSTRACT Diamondlike carbon (DLC) films have been extensively studied over the past decade, due to their unique combination of properties. One of the drawbacks with DLC films is that they are thermally unstable beyond 350 o C . Above 400 o C the changes are more profound and graphitization of the film occurs by conversion of C bonds from sp 3 to sp 2 , a phenomenon that is also observed during wear at hot spots . Thus for more than a decade researchers have focused on metal-containing DLC (Me- DLC) films in an effort to improve wear resistance, adhesion, thermal stability and toughness. A number of studies on synthesis and characterization of Me-DLC films have been conducted on Si-, Ti-, Ta-, W- and Nb-DLC [3-10]. Even though Cr is a carbide former and possesses an attractive combination of other properties (corrosion resistance, wear resistance, etc.) little work has been reported in this area [6,11]. The purpose of the present work was to initiate a systematic study of the processing-structure-property relationship in Cr-DLC films as a function of Cr content. The objective is to develop a better understanding of this system and identify possible compositional ranges where tribological performance and thermal stability are significantly improved. Cr-DLC nanocomposite films were deposited on Si (100) substrate, by reactive magnetron sputtering utilizing an intensified plasma-assisted processing system. The processing parameters (chamber pressure, bias voltage, magnetron current, etc.) were varied to synthesize Cr-DLC films, with Cr content ranging from ~0.1 at. % to 28 at. %. Carbon and chromium content was determined by wavelength dispersive spectroscopy (WDS) utilizing a JEOL JXA 733 super electron probe microscope. X-ray diffraction (XRD) experiments were performed, using a Rigaku Miniflex 2 θ diffractometer with a Cu - K α source and transmission electron microscopy (TEM) was conducted in a JEOL JEM...
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This note was uploaded on 03/18/2012 for the course PHYSICS 303 taught by Professor Ihn during the Spring '12 term at Swiss Federal Institute of Technology Zurich.
- Spring '12