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DLC, PJTF,1997,01 - W Q S R.R b Z 020297 27.11.91 R 194021...

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Unformatted text preview: W \ . . Q. . S R.R. b . Z 020297 27.11.91. \ R 194021, . \ . 20.12.96. ^ . . 6.00. ] .. . 6.2. . . . [ . . P.^. X - 6090 1/16. [ - - ^\X , , ZP ., 26 199034, [ [ Z R-34, 218-37-12 ZP V\^ 1 ,1 \ [ - [ 199034, , R-34, 9 ZP , 12 V\^, 1997, 23, 1 12 02;05;06.2;11;12 X c .X. U.X. \ - , X. . , X. . .P.^. \ , ^ X ZP , [.- Z 100-1000 C. 26 400 C. 400 C. CH 12 24 a-C:H 1996 . .%. 4 .%. \ 10 .%. .% CH c -- (a-C:H) , a-C:H . R , , . \ a-C:H 3 . , [ , -- . 1 4 .X. , X. . , X. . \ , U.X. \ X , , sp2 [2]. 1/3 , 1/2 . a-C:H -- , [1]. . [ , R - Ra . [3]. . - T . - X . . - - , 500C. U . ( ( ) ( ), 1 ). ( Z a-C:H 2 ), ( [B , . 10-4 .%. . .) V\^, 1997, 23, 1 X ... 5 \ : . 1-- ; 3-- ; 2 -- , .T , "A". , "A" .\ , , , , . V\^, 1997, 23, 1 6 .X. , X. . , X. . \ , U.X. \ - R , [4]. : . ( ) . 100-300 C 2920 1450 . -1 "A", Ts -- "A", .R - - , (CH2 ), 2950, 2860 (CH3 ) 1.62. 1370 -1 400C 1.56 20 C . , 300-400C ( . \ , 1 ). "A" ( (20-200 C) "A" ( 1 ). 2) , , "A" . - "A", . . ( 3 ). "A". \ 550-600C -- " ( " 800 C -- . a-C:H 4 .% 22 .%. ( . . CH) ) 400C -- , V\^, 1997, 23, 1 X 21 .%. ... 7 [ . , 400C 800 C , . ( . ), 500 - - CH . 1.8, 750 C. 2 "A". , 300 CH R , 12 , CH 500C, (adjacent sites) [5] [6,7]. 10 .%. 700 C, [5,7,8] . CH , - \ .%. , 100-1000 C. a-C:H 26 400 C. : .%. 4 2 CH -- 12 .%. -- 750 C, 10 .% .% - 500 C, CH 1[91.1 [bP. Z ^ 20, Z^^X 960216851-a P , V\^, 1997, 23, 1 8 .X. , X. . , X. . \ , U.X. \ [ [1] Discher B., Burenzer A., Koidl P. // Sol. State Commun. 1983. V. 48. P. 105. [2] Grill A., Patel V. // Appl. Phys. Lett. 1992. V. 60. N 17. P. 2089. [3] Ataev J., Konkov O.I., Terukov E.I., Vassilev V.A., Volkov A.S. // Phys. Status Solidi A. 1990. V. 120. P. 519. [4] Trapeznikova I.N., Konkov O.I., Terukov E.I., Yastrebov S.G. // Phys. Solid State. 1994. V. 36. N 9. P. 1519. [5] Robertson J. // Prog. Solid State Chem. 1992. V. 21. P. 199. [6] Beyer W., Wagner H. // J. Appl. Phys. 1982. V. 53. P. 8745. [7] Logothetidic S., Kiriakidis G., Palowra E.C. // J. Appl. Phys. 1991. V. 70. P. 2791. [8] Logothetidic S., Petalas G., Ves S. // J. Appl. Phys. 1996. V. 79. P. 1040. V\^, 1997, 23, 1 ...
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