Lect2UP020_(100324)

Lect2UP020_(100324) - Lecture 020 Submicron CMOS Technology...

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Lecture 020 – Submicron CMOS Technology (3/24/10) Page 020-1 CMOS Analog Circuit Design © P.E. Allen - 2010 LECTURE 020 - SUBMICRON CMOS TECHNOLOGY LECTURE ORGANIZATION Outline • CMOS Technology • Fundamental IC Process Steps • Typical Submicron CMOS Fabrication Process • Summary CMOS Analog Circuit Design, 2 nd Edition Reference Pages 18-29 Lecture 020 – Submicron CMOS Technology (3/24/10) Page 020-2 CMOS Analog Circuit Design © P.E. Allen - 2010 CMOS TECHNOLOGY Classification of Silicon Technology Silicon IC Technologies 060112-02 Junction Isolated Dielectric Isolated Oxide isolated CMOS PMOS (Aluminum Gate) NMOS Bipolar Bipolar/CMOS MOS Aluminum Silicon Aluminum Silicon Silicon- Germanium Silicon
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Lecture 020 – Submicron CMOS Technology (3/24/10) Page 020-3 CMOS Analog Circuit Design © P.E. Allen - 2010 Categorization of CMOS Technology • Minimum feature size as a function of time: 1 0.1 0.01 Minimum Feature Size (μm) 1985 1990 1995 2000 2005 2010 070215-01 Year Deep Submicron Technology Ultra Deep Submicron Technology Submicron Technology • Categories of CMOS technology: 1.) Submicron technology – L min ± 0.35 microns 2.) Deep Submicron technology (DSM) – 0.1 microns ² L min ² 0.35 microns 3.) Ultra-Deep Submicron technology (UDSM) – L min ² 0.1 microns Lecture 020 – Submicron CMOS Technology (3/24/10) Page 020-4 CMOS Analog Circuit Design © P.E. Allen - 2010 Why CMOS Technology? Comparison of BJT and MOSFET technology from an analog viewpoint: Comparison Feature BJT MOSFET Cutoff Frequency( f T ) 100 GHz 50 GHz (0.25 μ m) Noise (thermal about the same) Less 1/f More 1/f DC Range of Operation 9 decades of exponential current versus v BE 2-3 decades of square law behavior Transconductance (Same current) Larger by 10X Smaller by 10X Small Signal Output Resistance Slightly larger Smaller for short channel Switch Implementation Poor Good Capacitor Voltage dependent More options Performance/Power Ratio High Low Technology Improvement Slower Faster Therefore, • Almost every comparison favors the BJT, however a similar comparison made from a digital viewpoint would come up on the side of CMOS. • Therefore, since large-volume mixed-mode technology will be driven by digital demands, CMOS is an obvious result as the technology of availability.
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Lecture 020 – Submicron CMOS Technology (3/24/10) Page 020-5 CMOS Analog Circuit Design © P.E. Allen - 2010 How Does IC Technology Influence Analog IC Design? Characteristics of analog IC design: • Continuous in signal amplitude • Discrete or continuous in time • Signal processing primarily depends on ratios of values and time constants - Ratios are generally resistance, conductance, or capacitance - Time constants are generally products of resistance and capacitance • Dynamic range is determined by the largest and smallest signals Influence of IC Technology: • Accuracy of signal processing depends on the accuracy of the ratios of values • The dynamic range depends upon the linearity of the circuit elements and the noise • The value of components is limited by area considerations
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Lect2UP020_(100324) - Lecture 020 Submicron CMOS Technology...

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