CH2 WEBMatSE361_2Silicon_SubstrateNOTES - MatSE 361 OUTLINE...

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1 MatSE 361 OUTLINE: 2. Si Substrate Preparation OUTLINE MatSE 361 Chapter 0 Syllabus, Intro 2. Si Substrate Preparation Overall Process Wafer production Impurities in as Grown Si Denuding Process: Process Flow Denuding Process: Diffusion Review (Ch. 7 Mayer) Denuding Process: Quantitative SOI (Si on Insulator)
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