1-Introduction to Semiconductor Engineering

1-Introduction to Semiconductor Engineering - Ch1-1...

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Unformatted text preview: Ch1-1 半導體製造技術 Prof. Hsin-Hui Hu Lecture: Thu 15:10-18:00 Prof. Hu ’ s Office Hours: Mon 15:10-18:00 / Thu 14:10-15:00 Textbook: Hong Xiao, “ Introduction to Semiconductor Manufacturing Technology ” , Prentice Hall Reference: [1] James D. Plummer, M. D. Deal, and P. B. Griffin, “ Silicon VLSI Technology-Fundamentals, Practice and Modeling ” , 2000, Prentice Hall. [2] Stanley Wolf and Richard N. Tauber “ Silicon Processing for the VLSI ERA, Volume1: Process Technology ” , 1986, Lattice Press. [3] W. R. Runyan and K. E. Bean “ Semiconductor Integrated Circuit Processing Technology ” , 1990, Addison-Wesley. [4] James W. Mayer and Sylvanus S. Lau “ Electronic Materials Science: For Integrated Circuits in SI and GaAs ” , 1989, Prentice Hall. Ch1-2 評分標準 • Homework 、 Attendance (1/3) • Midterm (1/3) • Final Exam (1/3) Ch1-3 課程大綱 1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Wafer Manufacturing 4.Cleanroom, Clearn and Gettering4....
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This note was uploaded on 03/10/2012 for the course EECS 102 taught by Professor Wen during the Spring '11 term at National Taipei University.

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1-Introduction to Semiconductor Engineering - Ch1-1...

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