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Unformatted text preview: ic Scattering! Inelastic Scattering! Elastic Scattering events affect the trajectories of the beam electrons without altering the kinetic energy of the electrons. Elastic scattering is responsible for the phenomena of electron backscattering - an important imaging signal in SEM analysis.! ! ! Inelastic Scattering events result in a transfer of energy from the beam electrons to the atoms of the specimen, resulting in a number of material responses: generation of secondary electrons, Aüger electrons, characteristic and continuum (bremsstrahlung) x-rays, electon-hole pairs (in semiconducors and insulators), long wavelength electromagnetic radiation, lattice vibrations (phonons) and electron oscillations (plasmons) in metals.! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 07 ! 22 Elastic Scattering! ! ! ! ! ! ! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 07 ! 23 Inelastic Scattering! ! ! ! ! ! ! !"#$%"&...
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This note was uploaded on 01/16/2014 for the course CBEMS 164 taught by Professor Porter,j during the Fall '08 term at UC Irvine.

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