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Unformatted text preview: ic Scattering! Inelastic Scattering! Elastic Scattering events affect the trajectories
of the beam electrons without altering the
kinetic energy of the electrons. Elastic
scattering is responsible for the phenomena of
electron backscattering - an important imaging
signal in SEM analysis.!
Inelastic Scattering events result in a transfer
of energy from the beam electrons to the
atoms of the specimen, resulting in a number
of material responses: generation of
secondary electrons, Aüger electrons,
characteristic and continuum (bremsstrahlung)
x-rays, electon-hole pairs (in semiconducors
and insulators), long wavelength
electromagnetic radiation, lattice vibrations
(phonons) and electron oscillations (plasmons)
in metals.! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 07
! 22 Elastic Scattering!
! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 07
! 23 Inelastic Scattering!
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This note was uploaded on 01/16/2014 for the course CBEMS 164 taught by Professor Porter,j during the Fall '08 term at UC Irvine.
- Fall '08