Lect11_notes

7 cbems 164 xrd sem microanalysis lecture 11 8 grid

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Unformatted text preview: much signal CBEMS 164 – XRD, SEM & Microanalysis: Lecture 11 ! 4 Interaction Volume & Buried Features! ! ! ! ! ! ! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 11 ! 5 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 11 ! 6 Scintillator-Photomultiplier Combination! ! ! ! ! ! ! ET Detector – Negative Bias! ! ! ! ! ! ! •  Only detects BS electrons •  Realistically, can’t readily reposition the detector •  Specimen tilt will impact BS electrons escaping in the direction of the detector CBEMS 164 – XRD, SEM & Microanalysis: Lecture 11 ! 7 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 11 ! 8 Grid Bias and Working Distance Effects! ! ! ! ! ! ! Back-Scattered Electrons! ! ! ! ! ! ! •  These electrons have essentially the same energy as the beam electrons - indeed, they probably are the beam electrons •  They are elastically scattered during their interaction with an atom •  The strength off the backscattered electron signal is a function of Z. The direction of the maximum intensity of the backscattered signal is a function of surface topography CBEMS 164 – XRD, SEM & Microanalysis: Lecture 11 ! 9 Conventional Backscatter...
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This note was uploaded on 01/16/2014 for the course CBEMS 164 taught by Professor Porter,j during the Fall '08 term at UC Irvine.

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