Lect26_notes

cbems 164 xrd sem microanalysis lecture 26 35 unique

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Unformatted text preview: agglomeration CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 31 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 32 Magnetron Sputter Coater! ! ! ! ! ! ! •  Typically Au or Pd Ar-Gun Sputter Coater! ! ! ! ! ! ! •  Energetic Ar ions impinge on sputter target (C or Cr or Au) •  Sputtered element is directed towards sample surface •  Coatings of 10 s of nm are possible to eliminate charging •  Still may want to paint a track of carbon paint from nearby imaging area to ground CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 33 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 34 Geometry of Sputter Coater! ! •  ! ! ! •  ! ! •  Argon ion beam at 8 kV sputters material from target that is deposited on sample Line of sight deposition –  Stage rotated and tilts to get deposition in nooks and crannies –  ~15 minutes for C –  ~2 minutes for Ir C –  thinner coating –  No enhancement of signal •  Ir –  Can image Ir particles at high magnification –  Signal enhanced by high Z Ir Interior of SBT Sputter Coater! ! ! ! ! ! ! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 35 Unique Approaches! ! ! ! ! ! ! •  So many specimens require unique...
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