Lect26_notes

electron beam oriented vertically in our instrument

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Unformatted text preview: sis: Lecture 26 ! 41 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 42 Focused Ion Beam System – Quanta (FEI)! Focused Ion Beam Systems! ! ! ! ! ! ! •  Dual beam - electron beam and gallium ion beam •  Enables milling while imaging –  Depth profiling –  3D reconstruction •  TEM specimen preparation –  Semiconductor cross sections CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 43 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 44 Focused Ion Beam (FIB) Systems! Gallium Source! ! ! ! ! ! ! •  Schematic and real •  Ga melts at 30°C •  Liquid metal ion source (LIMS) ~ 5nm probe size •  Low surface energy –  wets W tip •  Low liquid vapor pressure –  Source lasts a long time •  Small energy spread CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 45 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 46 Ion Beam – Specimen Interactions! ! ! ! ! ! ! •  Milling occurs by physical sputtering of specimen –  Sputtered atom receives kinetic energy from ion in beam •  Inelastic scattering results in generation of...
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This note was uploaded on 01/16/2014 for the course CBEMS 164 taught by Professor Porter,j during the Fall '08 term at UC Irvine.

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