Lect26_notes

9 cbems 164 xrd sem microanalysis lecture 26 10 oxygen

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Unformatted text preview: d –  Can arise from multiple sources including backstreaming of oil from vacuum coating system •  Plasma cleaning relies on application of reactive gas plasma that reacts with (and removes) surface contamination CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 9 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 10 Oxygen Plasma Reactions! ! ! ! ! ! ! •  Dissociated oxygen atoms react with hydrocarbons converting them to CO, CO2 and H2O. –  Product gases are pumped out of system •  Plasma is created between an anode and a cathode (~ 8 kV potential) with low pressure reactive gas maintained by leaking gas (via needle valve) into the chamber •  Power of 10 W or thereabouts –  Dependent on samples Removing Contamination! ! ! ! ! ! ! •  But plasma cleaner can also be used to clean sample before imaging so that contamination build up is prevented CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 11 Polished Sections! ! ! ! ! ! ! •  Sur...
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This note was uploaded on 01/16/2014 for the course CBEMS 164 taught by Professor Porter,j during the Fall '08 term at UC Irvine.

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