Lect26_notes

Lect26_notes

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Unformatted text preview: n preparation lab does not automatically become clean when brought to SEM lab! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 3 Issues! ! ! ! ! ! ! •  Specimen electrical conductivity •  Specimen cleanliness •  Susceptibility for beam damage •  Special cases –  Transparency for STEM –  Cross Sections for Devices –  Etching for metals CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 4 Points to Consider! ! ! ! ! ! ! •  SEM typically images or obtains spatial information from the near surface of a bulk specimen •  Consider the interaction volume CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 5 Specimens Requiring No Sample Preparation! ! ! ! ! ! ! •  Fracture surfaces of metals –  Except maybe sectioning so sample can fit on stage –  Large stages enable large specimens •  Semiconductor devices •  MEMS devices •  Certain biological samples –  Biological specimen preparation outside scope Simple spec...
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This note was uploaded on 01/16/2014 for the course CBEMS 164 taught by Professor Porter,j during the Fall '08 term at UC Irvine.

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