Lect26_notes

Courtesy of m ferry cbems 164 xrd sem microanalysis

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Unformatted text preview: Microanalysis: Lecture 26 ! 50 Material Deposition! ! ! •  ! ! •  ! ! FIB induced deposition Chemical precursor gas is adsorbed onto specimen surface •  Deposition of energy by FIB results in chemical reaction that can enhance or retard milling –  Chemically enhanced material removal –  Material deposition Mechanical testing of Nanomachined Pillars! •  FIB used to micromachine micronsized posts •  Nanointenter used to load posts in compression •  Observe shear deformation Julia Greer - Caltech 51 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! Automated Routines! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 52 Slice and View! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 53 CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 54 FIB for TEM Sample Prep! FIB for TEM Sample Prep! CBEMS 164 – XRD, SEM & Microanalysis: Lecture 26 ! 55 3D Analysis: FIB Sectioning Combined with Imaging, EDS, EBSD! ! ! ! ! ! ! Schematic illustration of the geometry of the FIB column, the SEM column, the EBSD detector and the specimen stage. Courtesy of M. Ferry...
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This note was uploaded on 01/16/2014 for the course CBEMS 164 taught by Professor Porter,j during the Fall '08 term at UC Irvine.

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