0 mature process clustering parameter ranges of yield

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Unformatted text preview: ess Clustering parameter, α Ranges of Yield Parameters 0.50 1.5 Defect density, d in defects per cm2 Spring 2014, Jan 15 Spring ELEC 7770: Advanced VLSI Design (Agrawal) 8 References Clustered yield model M. L. Bushnell and V. D. Agrawal, Essentials of Electronic Testing for M. Digital, Memory and Mixed-Signal VLSI Circuits, Springer, 2000, Digital, Springer, Chapter 3. Chapter C. H. Stapper, “On Yield, Fault Distributions, and Clustering of C. Particles,” IBM Jour. of Res. and Dev., vol. 30, no. 3, pp. 326-338, IBM ., May 1986. May The unclustered defect model was first described in paper: B. T. Murphy, “Cost-Size Optima of Monolithic Integrated Circuits,” B. Proc. IEEE, vol. 52, no. 12, pp. 1537-1545, December 1964. Proc. A general reference on clustered distributions: A. Rogers, Statistical Analysis of Spatial Dispersions, London, United A. Statistical London, Kingdom: Pion Limited, 1974. Kingdom: Spring 2014, Jan 15 Spring ELEC 7770: Advanced VLSI Design (Agrawal) 9 Gordon E. Moore Spring 2014, Jan 15 Spring ELEC 7770: Advanced VLSI Design (Agrawal) 10 1965 “Cramming More Components onto Integrated Cramming Circuits,” Electronics, vol. 38, no. 8, April 19,...
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This document was uploaded on 01/17/2014.

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