H_75nm_L1_65um_D_2um

0158666804655084e 54631485629106017e 6i

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Unformatted text preview: 0000000004E-4 -5.483299904658754E-5 0 -9.673177203827164E-5+2.327061767990607E-5i -3.9730690230254294E-8-1.011241525702052E-9i 3.0139785148377136E-4-7.760940130872804E-5i -2.3125338060556999E-4 2.3363031888746294E-6 -3.1311884193006414E-6 -5.495296755946553E-5+1.2955662607494565E-5i 3.166278175126296E-6-7.222627711902429E-7i 1.7734374848353638E-4-4.3015136136997665E-5i -2.351628049955339E-4 2.44722393055155E-6 0 8.349035880557908E-7-2.3062092575461385E-7i -1.750045231233849E-7+4.14456231957825E-8i 1.3585233727722362E-4-3.314327042622454E-5i -2.336289549491837E-4 -1.0084653964692613E-6 0 -1.3755205942333342E-6+2.8569002939460296E-7i 5.8806005988863706E-8-1.4285383652390404E-8i 1.5247296113525202E-4-3.709142728632664E-5i -2.3397354869604444E-4 -1.1767868807006637E-6 -3.452605440590147E-6 -4.196677393701634E-5+9.934701814791833E-6i -9.740620192211458E-7+2.2127318219851903E-7i 1.4063026747711661E-4-3.430037901850204E-5i -2.3809769929626E-4 -1.6042226273214107E-6 0 -3.3658412142339594E-8-2.51...
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This document was uploaded on 01/24/2014.

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