H_75nm_L1_65um_D_2um

148066586850272e 7 1973811421974066e 7i

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Unformatted text preview: E-6 0 2.4335735907889022E-4-5.416548191156013E-5i 7.923202665886411E-5-1.7678272401715905E-5i 4.695559958818717E-4-1.1096839176353139E-4i -2.000000000000001E-6 -6.3527683660827655E-6 0 9.942071490037229E-5-2.159644676030803E-5i 9.11583653507575E-6-2.008660457628042E-6i 5.324242604062876E-4-1.2239687656181165E-4i -2.2388122231525693E-6 -6.515347618070642E-6 -6.116001898057113E-7 1.9470518481711445E-4-4.415886398665868E-5i -2.8301358076344605E-6+8.184855597044698E-7i 4.069368074623308E-4-9.500794112170236E-5i -3.0606240618790465E-6 -9.026136605161122E-6 0 1.4610231103625473E-4-3.2626878952854085E-5i -1.450941455440613E-4+3.2201903109587336E-5i 3.568440668872567E-4-8.500276803666858E-5i -3.879611390903682E-6 -9.821764655962206E-6 0 4.868598124892903E-5-1.1078248073582523E-5i -2.2369954252373045E-4+4.9226807666095475E-5i 5.355015728934831E-4-1.244583029907219E-4i -3.079470753736719E-6 -9.970827376510265E-6 -4.927879199493781E-7 6.121828381341031E-5-1.4135717402492808E-5i -8.125865080555184E-5+1.81451051234682...
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This document was uploaded on 01/24/2014.

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