H_75nm_L1_65um_D_2um

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Unformatted text preview: 085446877843229E-6 -2.052653917328272E-6+6.042456942993655E-7i 1.385961902156473E-5-3.5560361285005547E-6i 2.3447023599652693E-5-6.40201975583814E-6i -1.781248461571555E-4 1.5825016813375868E-4 -8.183704299659366E-6 -2.182199868078756E-6+6.34019769728421E-7i 1.1028465990610704E-5-2.8684061473624686E-6i 1.9540490066286924E-5-5.326031907976203E-6i -1.8513370759085495E-4 1.5663061762054246E-4 -5.266655276203344E-6 -2.1084060459134723E-6+6.045950470265233E-7i 1.0539952022553129E-5-2.6025718027570394E-6i 2.209928428526705E-5-5.955517837225727E-6i -1.8270107592026976E-4 1.5811894290645605E-4 -4.4484625595813866E-6 -1.5455076954957185E-6+4.479767469541252E-7i 8.422155454549524E-6-2.0890378678501387E-6i 2.296521715078866E-5-6.144083121883402E-6i -1.8324002122608183E-4 1.6031002896219052E-4 -6.769521350596811E-6 -1.7483591873155083E-6+5.03243712499044E-7i 7.67652492888285E-6-1.9615253181539706E-6i 1.8855349906510726E-5-5.084238319851663E-6i -1.8069770579437586E-4 1.5840895113478833E-4 -8.73089859406838E-6 -2.3334454...
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This document was uploaded on 01/24/2014.

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