H_75nm_L1_65um_D_2um

360087276954573e 7i 10922653679763743e

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Unformatted text preview: 35504428772E-4 -1.0705756615665804E-6 0 3.9992859650994386E-9-2.2323396022495256E-9i -1.413957199967647E-9+2.7846974732145113E-10i 4.2910201947243236E-6-7.414719983665712E-7i 1.0171235830403778E-4 -2.931406733461816E-7 -2.428707342072568E-6 1.370164547558942E-7-4.4059972331044394E-8i 9.479391397825364E-9+5.599046496738515E-9i 4.279179571265339E-6-7.850331742264775E-7i 1.043457692274481E-4 -1.2000668441830086E-7 -2.1370292660497455E-6 1.1549223699232862E-7-3.5945517928217903E-8i 2.520293891300081E-9+1.8221163322904618E-9i 4.147226018311238E-6-7.375546381907053E-7i 1.0350615634763832E-4 1.1400399513249964E-6 0 3.803459496887294E-9-2.4942585770989894E-9i 1.7510605283474479E-9+9.014803069068607E-10i 4.239773132953419E-6-7.267724798866406E-7i 1.0546851935532195E-4 -1.3985871279102301E-6 0 4.004885749356905E-9-2.017338241114235E-9i 1.7677722848558874E-10+1.1483417177893402E-9i 4.148114677019558E-6-6.907012553667376E-7i 1.0598986217251969E-4 1.425647028708817E-6 0 3.3211228353027147E-9-2.15735...
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