H_75nm_L1_65um_D_2um

3896546705173565e 7i 5102801067014824e 7

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Unformatted text preview: 0810012180005E-6i 3.833954323843638E-5-1.076778007787794E-5i -1.370073225361632E-4 -1.51686272399162E-4 0 2.264619993252425E-7-7.175969728388336E-8i -4.162281793716561E-5+1.0628410890071183E-5i 3.376203530649135E-5-9.948672523836752E-6i -1.3563406666745181E-4 -1.5065575633418498E-4 0 4.825577225695781E-7-1.47176061801987E-7i -4.125519100193348E-5+1.0719710747888428E-5i 2.993201904658305E-5-9.01394495103984E-6i -1.3910057050243305E-4 -1.50646633591891E-4 0 2.2812137418712352E-7-6.970432251222902E-8i -4.1458195289753934E-5+1.0797955992216183E-5i 2.9897568375519564E-5-9.019307230762044E-6i -1.3953337359103244E-4 -1.517762021841243E-4 -1.8431646426187396E-6 1.943381651490545E-7-5.768092323442513E-8i -3.421507797777197E-5+8.882585792763795E-6i 3.2675834564352916E-5-9.382870222383751E-6i -1.3788022479759834E-4 -1.5284850292541586E-4 -2.1804889206716427E-6 2.2833750117270658E-7-6.841431363990468E-8i -3.0653278175203005E-5+7.879871682395786E-6i 3.550493261729207E-5-9.967048170531257E-6i -1.47784529...
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