H_75nm_L1_65um_D_2um

439762114537712e 7 149679442025091e 7i

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Unformatted text preview: 4584237E-8i 1.0902620169290059E-6-1.0609524608469598E-7i 2.2073277160923784E-4 7.73820847299253E-6 0 2.439407309007616E-9-6.879608879448162E-9i -1.2055144688700657E-9-1.5416012002155646E-9i 1.1125431066850138E-6-7.32649633370032E-8i 2.1938351641604062E-4 7.2056054470762965E-6 -2.2633811202915978E-6 7.829072023203741E-8+9.464598758950835E-8i 7.732414515356705E-9+3.210395829770819E-8i 1.1247348685831075E-6-7.899832573316016E-8i 2.2011535120061308E-4 5.7898871413210925E-6 0 -2.9255964244737646E-10-1.3469776005715979E-8i -2.628779798720124E-9-4.088974312551391E-9i 1.1365944483391448E-6-2.9199740380539623E-8i 2.1844656910886942E-4 1.583007840029406E-5 0 -3.5587985385117688E-9-2.0048706877191035E-8i 4.955444345290818E-10+7.256653586110415E-10i 1.1998571988876E-6-3.997156328393048E-8i 2.1916204795958887E-4 1.6086368600037528E-5 -1.5587656651298138E-6 5.843021862387926E-8+3.539594095407568E-8i -3.5854358783358336E-9+4.236881804908348E-9i 1.1480702781437123E-6-9.109398279191713E-8i 2.1885702643407366E-4 1.4195411946511647E-5 0 -5.84244581041...
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This document was uploaded on 01/24/2014.

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