H_75nm_L1_65um_D_2um

579801899229361e 4 0 11020859487066098e

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Unformatted text preview: 9E-7i 1.020330363384833E-5-2.722558129720793E-6i -8.263849183626054E-5 1.7107001605395688E-4 -7.875108619609492E-6 1.0460099707377233E-6-2.8009243223233933E-7i 2.554366999702777E-6-6.690837314751773E-7i 1.1217017516170847E-5-2.9847031230819525E-6i -8.206952198640799E-5 1.8156391847472573E-4 -1.3509414744311071E-5 9.794927858959767E-7-2.665837676464365E-7i 2.5683358620334903E-6-6.872447419354241E-7i 8.274409796797786E-6-2.2065197604196177E-6i -1.0223485007738923E-4 1.814172376876597E-4 -6.949134067803523E-6 4.372723209307288E-7-1.1757013881514386E-7i 1.8644994887030242E-6-5.03773541338488E-7i 1.0182967941440555E-5-2.7303766501900483E-6i -9.864763974528442E-5 1.879145078021117E-4 0 1.0975135017053834E-8+4.198378168881155E-9i 3.2734352901908625E-10-4.4907266529524426E-9i 8.654850961044553E-6-2.3168644541044745E-6i -1.063716452489749E-4 1.9999999999999998E-4 0 -5.2968841524578445E-8+2.1365060153661318E-8i -1.7248683079979532E-7+4.4110571793008295E-8i 6.974208105754806E-6-1.8666626553821891...
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This document was uploaded on 01/24/2014.

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