H_75nm_L1_65um_D_2um

84290617218758e 5 0 1311559809907348e

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Unformatted text preview: 154306553878E-4 0 1.0879246568323148E-6-2.9821491748195303E-7i 3.031147439773419E-5-6.7749421229141606E-6i 3.3824128549160364E-5-9.214042406683972E-6i -1.0363625532812887E-4 1.5424737778596914E-4 -1.2943299279543748E-6 1.0715443500832E-6-3.084797908360945E-7i 2.0333802775189382E-5-4.657590671250455E-6i 3.5591362525939835E-5-9.350352564853887E-6i -1.0392505224016336E-4 1.5330890932305848E-4 0 1.0717865197911944E-6-2.89912943902005E-7i 3.144251250169561E-5-7.0958181221386874E-6i 3.391708769981276E-5-9.304898948258317E-6i -1.0563438148078573E-4 1.5389236428883207E-4 0 7.065452667405261E-7-1.8862811639504726E-7i 3.22911527870969E-5-7.230901739103186E-6i 3.910074284784003E-5-1.0455260650983286E-5i -1.0656993871983377E-4 1.5499999999999995E-4 0 1.0051382647036089E-7-1.3196309956812572E-8i 1.6476775324227908E-5-3.5566482410269292E-6i 5.653088388464765E-5-1.4061829097285657E-5i -1.0538535429796447E-4 1.5473087668393145E-4 -1.2558117889060755E-6 9.567743539242901E-7-2.660947655912364E-7i 1.7511...
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This document was uploaded on 01/24/2014.

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