H_75nm_L1_65um_D_2um

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Unformatted text preview: 2996E-5 4.0110346374843745E-5 -2.0365571730955845E-5 1.808604233831793E-5-4.469644005703162E-6i 2.3443949038724122E-5-5.486125034201439E-6i 2.7127548094902495E-5-6.758838008240367E-6i -2.313970832991099E-5 3.515731708834937E-5 -1.310091841443613E-5 1.8322885116886375E-5-4.516391979629925E-6i 3.608554738988853E-5-8.416988697089933E-6i 5.072283900079571E-5-1.241421605540651E-5i -2.702795780788052E-5 5.244182031000315E-5 -2.545246511276652E-5 1.7904537182624277E-5-4.595940254216447E-6i 1.920283699024312E-5-4.543830836412547E-6i 2.362388900740707E-5-5.997999574167503E-6i -6.646107776175591E-5 6.4295292021957E-5 -1.4516825315335636E-5 5.6407447927902517E-5-1.528113915053244E-5i 2.9805538258211535E-5-7.417809131429524E-6i 5.027370182574192E-5-1.3169239010801768E-5i -6.882667536990142E-5 6.892013829838786E-5 -1.629125779129423E-5 5.3747227756926856E-5-1.4728453464578067E-5i 3.0254517243501657E-5-7.634140584810257E-6i 3.958709937712042E-5-1.0402783979015178E-5i -6.77790844167311E-5 5.4684825083275784E-5 -1.29968575728530...
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This document was uploaded on 01/24/2014.

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