H_75nm_L1_65um_D_10um

0113838136875204e 4 242402041741034e 6

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Unformatted text preview: 87417817537E-7i -1.0647137590366676E-7+1.0946321886786715E-8i 1.8842051872156923E-5-4.703009293435269E-6i 2.5174148069208936E-5 -4.645181088492192E-6 -1.800986303092834E-6 1.2861049949451754E-6-3.1400430780463025E-7i -2.1833241807020154E-7+4.8118707998361385E-9i 1.8391102123159048E-5-4.625793652846151E-6i 3.247118824888745E-5 -3.088812381402219E-6 -1.8664419401166874E-6 8.897082487456442E-7-2.2111490386733834E-7i -9.67366391439393E-8-4.942305420027837E-10i 1.4244223041478403E-5-3.6050128306042847E-6i 2.9613985349158254E-5 -6.223045819512761E-6 -1.1537707317803408E-6 6.382830080396218E-7-1.5430153588034306E-7i -2.0231453382563266E-7-8.135329298965634E-8i 1.5683270780959692E-5-3.9960415131521945E-6i 3.116684194440693E-5 -4.999999999999998E-6 0 -5.504175721355547E-10-2.698019643512398E-9i -4.243146801667091E-7+7.532595845448584E-8i 1.484010051932291E-5-3.865182264222968E-6i 3.0651682894136565E-5 -1.3295464208126336E-6 -2.0256371662927385E-6 1.0620526262175418E-6-2.628273654511269E-7i -3.804692998603121E-8+1.1687874860105166E-9i 1.5159018012757352E-5-3.8130002800354415E-6i 3.0417954504331128E-5 -2.1362369978784022E-6 0 2.9456256739843493E-8-1.3550359175457148E-8i 3.061401945424376E-9+3.1895475604204124E-9i 1.5280939807575318E-5-3.8540137133464E-6i 2.8780667293065224E-5 -1.5073181087596683E-6 0 3.442320461680609E-8-1.4869560936476647E-8i 2.995939785065133E-9+2.1636164821490686E-9i 1.6198460453090485E-5-4.070852967861512E-6i 2.7879261255136748E-5 -2.437877081209755E-6 -1.695293692952072E-6 1.0500934701968741E-6-2.589400219562831E-7i -7.655118645580972E-8+5.834828607007609E-9i 1.6677990839586983E-5-4.18794800310351E-6i 2.7731745437555347E-5 1.1797035703457791E-7 0 2.0337539979931095E-8-1.1496402429313378E-8i 2.568559867163284E-9-6.97038116200252E-11i 1.6837270021304468E-5-4.21981324658055E-6i 3.216210104991843E-5 -4.951115289288555E-6 -1.714104558112157E-6 8.245235846756668E-7-2.0406313051733208E-7i -2.041909620928223E-7-1.4226433974882206E-8i 1.438563384324607E-5-3.659385301930997E-6i 3.038942769258748E-5 -3.825542736355964E-6 0 3.4894557884737696E-8-1.291922389589736E-8i 4.513038932270738E-9+6.1126535211237074E-9i 1.5149230086494198E-5-3.852042692618281E-6i 2.9374088538417714E-5 -4.591880966731193E-6 -1.553126592871918E-6 8.705746406704091E-7-2.140217507322042E-7i -1.9158593492439943E-7-2.5258320170827843E-9i 1.5793306758129233E-5-4.003783941438769E-6i 3.0339929949924462E-5 -3.1743611456078224E-6 -2.118341243757572E-6 1.1300054635844218E-6-2.7832909403884226E-7i -1.1503550333921583E-7+9.349535999941023E-10i 1.5294834642794887E-5-3.855504584492336E-6i 3.0726414297727096E-5 -5.736586362121611E-6 -2.2505709097718773E-6 1.1551619108771946E-6-2.8186510159547E-7i -2.2021785410974645E-7-3.620881690906524E-8i 1.5073367128410303E-5-3.8029803277510185E-6i 2.7069029044773806E-5 -6.65511571050335E-6 0 2.1692757602720382E-8+5.376363854114885E-10i -1.343549676006972E-7-1.522003898046711E-7i 1.708099735582599E-5-4.423422985054986E-6i 2.712241416291335E-5 -7.7482618348...
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This document was uploaded on 01/24/2014.

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