H_75nm_L1_65um_D_10um

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Unformatted text preview: 73981781111E-7i 2.216682296141277E-4 8.497317969418075E-5 0 3.8363962853461267E-7+1.8203022150390112E-7i 4.0877953453614235E-9+2.380055711063905E-9i 9.733135268749473E-7-1.3096994428348906E-7i 2.2120789147275346E-4 3.05188022522699E-5 0 2.761775165119603E-7+1.695944059024941E-7i -2.0803905897027325E-8-2.8350833531504137E-9i 9.869784907535353E-7-1.589290492875759E-7i 2.2137941037818858E-4 3.302768710266709E-5 0 2.937524285206045E-7+1.7446751977960492E-7i -1.7854699659797353E-8-2.607657242422502E-9i 9.927929907598267E-7-1.5455286703732876E-7i 2.1892418071342383E-4 3.442022233153235E-5 0 2.8459930114957967E-7+1.6334341981185447E-7i -2.9385418596724986E-8-4.965864472206918E-9i 9.48582398026081E-7-1.9618135972884496E-7i 2.2264982971087206E-4 3.126408325401816E-5 -1.8574667552262455E-6 2.2565629255063674E-7+1.2543719544145267E-7i -1.5386804520715765E-8-2.5506572208262397E-9i 1.0183564131385854E-6-1.284115047140608E-7i 2.2207703083933442E-4 3.375885521164744E-5 -1.732659509166152E-6 2.4732114053091117E-7+1.344754020401969E-7i -1.644761541414216E-8-3.1127761425060357E-9i 1.0091414379446544E-6-1.387338296030991E-7i 2.1925038748515392E-4 3.55640890578681E-5 -2.364271089957699E-6 2.596194904436155E-7+1.3181002908398616E-7i -2.647494024358609E-8-5.441779011655689E-9i 9.582962026299759E-7-1.867554549058408E-7i 2.2123118087554952E-4 3.572989405703565E-5 0 3.027424593628918E-7+1.738837543810515E-7i -1.7486850807762946E-8-2.939507549027701E-9i 9.920436994037105E-7-1.55853330673278E-7i 2.1846639351078914E-4 6.166747048901348E-5 0 3.6007889115165927E-7+1.737602621380673E-7i -8.201725624760528E-9-5.409388045302725E-10i 9.262725143852589E-7-1.9284831717596222E-7i 2.1815072429932282E-4 5.773543372939772E-5 0 3.532142480522409E-7+1.7236291553133207E-7i -1.1340140381509785E-8-1.3078589369375053E-9i 9.251536703266364E-7-1.9841539183783751E-7i 2.1860869644635086E-4 5.99223890605105E-5 -2.1051049565589796E-6 3.242795184603467E-7+1.4568769930845832E-7i -7.171674700978668E-9-1.5936884263617833E-9i 9.355626491223577E-7-1.8705329399967215E-7i 2.192768670718323E-4 5.975452981294509E-5 0 3.6445995874974754E-7+1.7805937864673153E-7i -8.459769506749675E-9-8.82966717500403E-10i 9.427103453370218E-7-1.8209109454644595E-7i 2.188876544428907E-4 6.668845706023276E-5 -2.8890839125069027E-6 3.1757034566245646E-7+1.356199129634113E-7i -5.356522792934249E-10-3.059694441453803E-10i 9.324028410894738E-7-1.8051890911362094E-7i 2.2129913987053315E-4 5.150153770147813E-5 0 3.586445137307432E-7+1.840646300505614E-7i -9.086922460446517E-9-1.5515817353685866E-9i 9.980351072451769E-7-1.4792302891730824E-7i 2.2060380104395175E-4 5.352684829479813E-5 -2.0304298497296213E-6 3.087317518630249E-7+1.4395556166715212E-7i -8.569588373358626E-9-2.168908943251834E-9i 9.78264078303342E-7-1.5881140978785966E-7i 2.1968909782139697E-4 5.6032364737376107E-5 0 3.587890525814832E-7+1.7828060195967297E-7i -1.0240222934557537E-8-1.5079873601906828E-9i 9.56104689025751E-7-1.757621990288637E-7i 2.2003147605721717E-4 5.7837085135677...
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This document was uploaded on 01/24/2014.

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