H_75nm_L1_65um_D_10um

0479456679332992e 4 7500000000000001e 8

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Unformatted text preview: i 5.186594316148667E-6-7.920290558589451E-7i 4.164284733638851E-5-9.75860274283328E-6i -9.82529654230601E-5 -1.532101351104512E-4 7.500000000000001E-8 -1.333282424802358E-6+3.6186169808175017E-7i 2.1974129254895703E-5-4.463180357844776E-6i 2.8201395653338563E-5-7.5544089065431115E-6i -1.086823743951696E-4 -1.568346498960083E-4 0 3.083244822811119E-7-5.190197184611827E-8i -1.1848173211942735E-6+2.640208681419108E-7i 3.144276434096434E-5-8.089319720983975E-6i -1.0940977476442914E-4 -1.5499999999999995E-4 0 -6.697814414202696E-7+1.5317300178230298E-7i 7.993586260575348E-7-2.2385259574383413E-7i 5.215292406172692E-5-1.2663832169471072E-5i -1.0900411902763523E-4 -1.559348488202626E-4 1.1502469443950255E-7 -9.149715961183821E-7+2.0953782113123745E-7i 2.198617886084442E-6-4.475789178541116E-7i 3.9994710589556316E-5-9.997110094255487E-6i -1.0352092450012718E-4 -1.5693315378111363E-4 0 2.9742573059848845E-7-4.754569620860072E-8i -1.048107948650734E-6+2.253239273594665E-7i 2.844369348232159E-5-7.27728065110413E-6i -1.054469249077812E-4 -1.5720103626484178E-4 0 -4.953882176364711E-7+1.1023614824989582E-7i -1.8651077397708156E-6+3.948852682518489E-7i 2.7972837303821074E-5-7.226342891716768E-6i -9.818175506793981E-5 -1.5702596423576522E-4 0 8.19997853835578E-7-1.4235011294629757E-7i -1.2733013038802692E-6+2.5945491783892563E-7i 2.4970479847261707E-5-6.384552049065329E-6i -1.0004897829628159E-4 -1.5706584698492378E-4 0 -6.422152658666327E-7+1.303410092542053E-7i -1.459331792455344E-6+2.999426271614129E-7i 2.7000757051888588E-5-6.848938158193552E-6i -1.0422598739109358E-4 -1.5499999999999997E-4 0 -3.3583672282011534E-7+7.897728082628674E-8i 6.402037858892337E-7-1.7723752260177162E-7i 4.70186898027386E-5-1.1243047341596979E-5i -1.0387964562496846E-4 -1.5590155753552817E-4 1.4653710487558115E-7 -8.712712513357183E-7+1.9638073887421706E-7i 2.570277686649488E-6-5.05816129925396E-7i 3.652477534804577E-5-9.030842788582127E-6i -9.904220001775798E-5 -1.5499999999999995E-4 0 -5.458081241416224E-7+1.1055388604575E-7i 6.736319626335156E-7-1.741414875758319E-7i 4.1968777447834275E-5-9.859551677119868E-6i -9.852628126354408E-5 -1.557924410434148E-4 6.802003407316918E-8 -1.3759703261506662E-6+2.7424013535060077E-7i 2.033457450652254E-6-3.720396693288053E-7i 3.4318923894473274E-5-8.302897304159756E-6i -1.0246315723539862E-4 -1.55E-4 7.500000000000002E-8 -7.197078286530489E-7+1.6817823791925868E-7i 7.199573657757521E-6-1.2796627183627608E-6i 4.656657297857223E-5-1.1123381390711493E-5i -1.024980582666484E-4 -1.5499999999999997E-4 0 -3.198292797268465E-7+7.542692376238946E-8i 1.7444675025319545E-6-3.985824113135966E-7i 4.6663000976110425E-5-1.1031960771956673E-5i -1.0173352146908702E-4 -1.5638308567256316E-4 0 3.9120736069209185E-7-6.994269599602809E-8i -1.60736087443288E-6+3.235918206297613E-7i 3.1462112426927276E-5-7.86047260600348E-6i -1.0319065230078791E-4 -1.5582997540892945E-4 2.0410711831318566E-7 2.600871130797877E-7-3.07240733632419E-8i 3.7405469841100823E-6-7.866251064303497...
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This document was uploaded on 01/24/2014.

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