H_75nm_L1_65um_D_10um

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Unformatted text preview: 7089E-9+3.011674183650559E-8i 3.1985542824149704E-5-7.653331757876067E-6i 1.0275903786068492E-5 1.1963452124475154E-5 0 6.442178017536276E-8-4.899404860980727E-8i 1.1624423077695349E-8+2.6746387323400416E-8i 3.4807521098199395E-5-8.325918415416859E-6i -1.23906630345334E-5 1.1166381995309036E-5 0 1.8377514498278105E-5-4.171000577418184E-6i 3.7916299926641066E-5-8.538989646428383E-6i 3.7922329165432345E-4-8.845005205400083E-5i -1.3471440866984089E-5 1.0428785767636387E-5 7.88510545414561E-7 -1.0105846315604513E-4+2.3522635551160757E-5i -1.9066857862696073E-4+4.3620484835849276E-5i 5.49201654718125E-4-1.2796380355906847E-4i -7.748155378131798E-6 9.762261841991795E-6 0 2.7683684744840944E-6-7.222396952157292E-7i 8.705460188749786E-7-2.3252783515226935E-7i 1.8867311957791968E-4-4.4208618087742386E-5i -8.674612889833355E-6 1.0347104587888276E-5 7.753491165414257E-7 -2.8297479006295878E-5+6.4419163043174704E-6i -1.671526351993632E-5+3.8142764954265353E-6i 2.048764592475521E-4-4.800214802209713E-5i -8.292629639516477E-6 1.1520265022423168E-5 0 2.5512150727352045E-6-6.568968682399851E-7i 2.424893269642285E-6-5.993232844973614E-7i 1.7559366693528818E-4-4.1190963897911985E-5i -9.97637869619824E-6 1.124475756622183E-5 7.612861642204849E-7 -3.0077244307311184E-5+6.889927596215722E-6i -2.3819795343601912E-5+5.421664197153266E-6i 2.2890369906680184E-4-5.362213349672398E-5i -9.768408449178619E-6 1.2136014872009596E-5 0 3.7535880639191775E-7-1.4727562606476133E-7i -2.547357634701463E-7-2.4308340167036696E-9i 2.0344986160578745E-4-4.7672539999629444E-5i 5.474046319860166E-5 1.7109716053894254E-5 0 1.0707560111396924E-8-1.0719811154545622E-8i 3.693984467617595E-9+9.438695737322421E-10i 7.808183619106276E-6-1.8666257904526565E-6i 5.188755856692443E-5 1.6201596426307162E-5 0 1.4116558286215897E-8-1.1254555807890016E-8i 3.5357841545497718E-9+1.6967676618898482E-9i 8.3330260592897E-6-1.996888443480371E-6i 7.499999999999998E-5 5.9335276555218315E-5 7.500000000000001E-8 3.4995164319303624E-8+1.2527281977536943E-7i 2.0114430509220182E-8+5.7528013079144805E-9i 5.421306943964202E-6-5.158067347925568E-7i 7.5E-5 6.16349208904175E-5 0 3.428403955511851E-7-1.7547833322504916E-7i -8.205261992641835E-9+2.245962933916743E-9i 5.241137308792387E-6-5.148291751522205E-7i 7.499999999999998E-5 6.104387883293017E-5 7.5E-8 3.5312167198805133E-8+1.3287301803098646E-7i -4.8490109635923595E-9-3.23154517034574E-9i 5.388987486777463E-6-5.165798532415234E-7i 7.421386022572475E-5 6.174867050874433E-5 1.4034912158762683E-7 1.314544222855383E-7+4.7835106733312704E-8i -9.159247579132446E-10-1.3394284151720578E-8i 5.060365871082111E-6-7.435635683247007E-7i 7.4037124212268E-5 6.0878482758475606E-5 9.367969451310992E-8 -1.9750059559314748E-8+5.153206903973917E-8i -5.045865810859168E-9-1.0732539484047122E-8i 5.10105529292126E-6-7.57554092134776E-7i 7.499999999999998E-5 5.990248018249696E-5 0 3.365339139722165E-7-1.8055143255165672E-7i 4.692041185704737E-9-4.971301558425031E-9i 5.299335377740805E-6-5.02...
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This document was uploaded on 01/24/2014.

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