H_75nm_L1_65um_D_10um

079218111677226e 6 0 12372767388108178e 8

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Unformatted text preview: 26893507E-4 0 -3.197890055858675E-8+8.409390497075048E-9i -1.5411113878589988E-8+1.845948825591827E-8i 1.3801386363843573E-5-3.6232545048708945E-6i -6.653476203240321E-5 -1.50601495684416E-4 -3.2228891206486324E-6 1.0335991314158858E-6-2.5347827791970024E-7i -1.0750189357303472E-6+2.877058663556739E-7i 1.358148523338609E-5-3.568652927292039E-6i -6.277665724329485E-5 -1.5188247188179852E-4 0 4.0284010982318446E-9+4.960715069819556E-10i -1.9598410405451438E-8+1.9001188990864597E-8i 1.2314429207358463E-5-3.2440797823704377E-6i -6.81803694680589E-5 -1.4748955483879022E-4 -4.4973793463783296E-6 1.91799861771321E-6-4.608715119038768E-7i -1.754061990601388E-6+4.5983079226136665E-7i 1.5009066392599217E-5-3.9398518072747414E-6i -6.69758732179047E-5 -1.4430250783889378E-4 -3.359485411073478E-6 1.5575471993728187E-6-3.780049342938771E-7i -1.3288293663289818E-6+3.5595716026453886E-7i 1.5917794810311395E-5-4.172368636629002E-6i -6.51384603808537E-5 -1.445213514978997E-4 0 -2.4915309737393917E-8+6.0913406739329275E-9i -1.199420046540976E-8+1.8446573154942313E-8i 1.531729207309576E-5-4.017861124310249E-6i -6.115902918840824E-5 -1.503663183284568E-4 -4.163828570192137E-6 9.876274259643016E-7-2.536889852639759E-7i -1.0810056544764517E-6+2.936455533446922E-7i 1.2160742224525034E-5-3.2089846766783205E-6i -6.389762441419552E-5 -1.4581792688076928E-4 -3.405901763659304E-6 1.1562971794758496E-6-2.9027901481725254E-7i -1.1017101915554006E-6+2.99547411731875E-7i 1.4255732074478747E-5-3.7512354289186275E-6i -6.0872510092202265E-5 -1.4710322099985277E-4 0 1.6841788065431278E-8-2.9077792708387395E-9i -2.6894798732986686E-8+2.1183732768515855E-8i 1.3107459497372145E-5-3.45393035664153E-6i -6.803374012208808E-5 -1.3230149603156465E-4 0 2.076307153986434E-9-1.6458577301962467E-9i -5.02552453422155E-8+2.918485316610875E-8i 2.249208300462065E-5-5.869144626457583E-6i -7.058227973640149E-5 -1.2998165265745725E-4 -1.8811553401470956E-6 3.0211566598282254E-6-7.139924041865484E-7i -1.2868698274783896E-6+3.568183791974429E-7i 2.6492355897683408E-5-6.873820510883784E-6i -6.900075740851351E-5 -1.325487081664395E-4 -2.5848091731683465E-6 2.6875403758301322E-6-6.484528429801988E-7i -1.4670466296325995E-6+4.023106098703111E-7i 2.2791554546199274E-5-5.948278739703605E-6i 3.777603476959541E-5 -1.869822771650399E-4 -1.5497775211473326E-5 3.378563945399603E-7-9.211539358065298E-8i -3.56389709008005E-7+9.325556537694838E-8i 2.499899976486868E-6-6.426459429396543E-7i 5.139467827456203E-5 -1.8230332026690502E-4 -1.0469771739550958E-4 1.3703443710753994E-6-3.647010609924122E-7i -1.3073084163601402E-6+3.306135567528641E-7i 9.592772874311368E-7-2.5107690184051527E-7i 5.117611085860547E-5 -1.9999999999999998E-4 -9.532511608529768E-5 1.0981701914418809E-6-2.927886566858048E-7i -1.1391664211070557E-6+2.890617136349315E-7i 1.0474612630750635E-6-2.719902276578849E-7i 4.618160179889393E-5 -1.9999999999999998E-4 -4.6227386320997425E-5 7.181395364966299E-7-1.9354385376582282E-7i -7.681460241880624E-7+1.9511...
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This document was uploaded on 01/24/2014.

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