H_75nm_L1_65um_D_10um

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Unformatted text preview: 5E-4 0 -4.04188496783359E-8-2.770095044866321E-8i -8.410831777252471E-9-9.77343496280994E-10i 3.712038127019406E-6-6.80648091553234E-7i 7.500000000000001E-5 -1.0723064668962006E-4 7.500000000000001E-8 8.807606965987489E-8+1.3574115353879906E-7i 8.247116166679477E-9+9.256988551469774E-9i 4.133723931236617E-6-3.870200738218631E-7i 7.404304742161273E-5 -1.0829186280604624E-4 1.235711621369323E-7 1.0214294578030081E-7+2.5919967410262257E-8i -1.1225958786685586E-8-1.1422128753241223E-8i 3.8059368101945852E-6-5.648363312914283E-7i 1.1888345305589137E-4 1.568847819697644E-4 0 4.091161501370774E-10-3.80942621891478E-9i 1.8778512500192135E-8+1.1221568279630445E-9i 1.8332918296074704E-6-2.4912569241538337E-7i 1.1712344965801285E-4 1.5696186099301132E-4 0 6.331270168292297E-9+2.0426871999434937E-11i 2.4865384465564782E-8+5.943279534891914E-9i 1.8410067460784494E-6-2.6407952318762906E-7i 1.2167989991924623E-4 1.5764718574920247E-4 1.1966616994613187E-6 -1.0855343703526682E-8+2.7323403961359356E-9i -5.8644582439577336E-8-3.17811505005426E-8i 1.7484088439218813E-6-2.5940434464490377E-7i 1.2335030428930777E-4 1.5913819261127162E-4 0 3.0040090628772123E-9-1.9954648317836027E-9i 1.1259921257252928E-8-2.3971080806804482E-9i 1.6789513106574993E-6-2.662106951016909E-7i 1.2053188369816886E-4 1.589952661958694E-4 0 1.5881635133599201E-9-2.8269043635067352E-9i 9.741169245968813E-9-3.3340375305642627E-9i 1.7155628517315042E-6-2.762874030726634E-7i 1.2591760901936632E-4 3.6226476804579043E-6 0 5.211321542120639E-9+9.034727258358051E-10i -6.827917849853397E-9-7.749647788347166E-9i 3.008507532781938E-6-3.572264483755172E-7i 1.2435132173563605E-4 3.026725558480343E-6 0 -8.756608041057701E-9-1.2172628017007093E-8i -6.781022767525527E-8-3.730611276350813E-8i 2.9989017397522824E-6-4.0311559087317986E-7i 1.2316892916640115E-4 4.9999999999999996E-6 0 -9.467452385752952E-9-1.3718086629774156E-8i 1.9622879127736378E-7-6.08912055850188E-8i 3.369872058026866E-6-1.9461190625757488E-7i 1.2244197563789525E-4 3.1446089383276683E-6 0 5.813613236564119E-9-7.610620899557107E-10i -1.4447562054533555E-8-7.87563043566938E-9i 3.0587635967523566E-6-4.1672643273721044E-7i 1.214437883307735E-4 4.999999999999999E-6 7.5E-8 -1.021272472405136E-9+2.1739251805428114E-9i 1.21198940757742E-7+1.4211912307244795E-7i 3.4823497296626156E-6-2.2083241892867126E-7i 1.2143737304993241E-4 4.9999999999999996E-6 0 1.9749933128128738E-8+1.2915565949512861E-8i 2.799038750120924E-7-4.959476747295082E-8i 3.458922441776832E-6-1.8045045769290722E-7i 1.1971221843368032E-4 4.999999999999999E-6 7.500000000000001E-8 -1.922591620749754E-8-8.386597807016474E-9i 2.9801779142008508E-8+1.2613998694091953E-7i 3.5810232621020886E-6-2.1496998294660658E-7i 1.3702791740461242E-4 4.999999999999999E-6 7.500000000000001E-8 -4.334655139740533E-9-9.48996159407736E-10i 1.065923400735728E-7+1.1204057751567706E-7i 2.989932512075113E-6-1.3681809529182797E-7i 1.3702137809815115E-4 4.9999999999999996E-6 0 1.277713450429416E-8+4.799482615526525E-9i 2.52189879233...
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This document was uploaded on 01/24/2014.

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