H_75nm_L1_65um_D_10um

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Unformatted text preview: 4430116237E-10i 2.313679654097077E-9-5.759375699082401E-10i -6.097542664578391E-4 -5.004050101607367E-4 0 4.9629413687240586E-12-1.26712468806774E-12i 4.5696800192322776E-12-1.4412094967280715E-12i 3.3214204379245027E-10-7.986724417572407E-11i -6.313199068287415E-4 -4.6812536026201646E-4 6.707654076729284E-5 7.560224517332061E-11-1.9093854449649165E-11i 5.853123866354801E-11-1.5613218185621143E-11i 3.243112322860268E-10-7.75325784881424E-11i -6.422047328085474E-4 -4.761964871630857E-4 6.823303284948754E-5 5.306172382451467E-12-1.2752969007720166E-12i 4.066269557589556E-12-1.083704281126459E-12i 2.0444689844034736E-11-4.240537765860313E-12i -6.530895587883533E-4 -4.8426761406415497E-4 6.938952493168225E-5 1.3905143088008263E-19+1.4377878487014992E-20i 1.3314978902844593E-19-3.1010173636104147E-20i 1.937048878012143E-18-7.103163218446818E-20i -5.28920515153187E-4 -5.289112294611313E-4 0 -5.334092001466376E-9+1.398618587201778E-9i -5.131985386835001E-9+1.198982236967952E-9i 1.1905739018458988E-7-3.0817766305700765E-8i -5.522427451694501E-4 -5.004858297965353E-4 6.360726829995905E-5 2.7139708054199908E-8-7.064610276289822E-9i 3.1186375202965984E-8-8.30387724885666E-9i 1.1755325659966396E-7-3.0383366222036584E-8i -5.385372517923361E-4 -5.385277972695154E-4 0 4.457965259484118E-10-1.1862819078337846E-10i 5.227884410661496E-10-1.5439054076947776E-10i 1.4577683875811973E-8-3.7192333335007553E-9i -5.622835223543492E-4 -5.095855721564723E-4 6.476376408723103E-5 3.2621938214770835E-9-8.429256447451594E-10i 3.2496069090697684E-9-8.649834279528155E-10i 1.4269103764142723E-8-3.6325971674531354E-9i -5.481539884314849E-4 -5.481443650778996E-4 0 5.885363005069415E-11-1.5859321592385554E-11i 6.351517881537375E-11-1.946104189447136E-11i 2.3433638072621627E-9-5.875355643869524E-10i -5.723242995392484E-4 -5.186853145164093E-4 6.5920259874503E-5 4.910980900602795E-10-1.2552659421996668E-10i 4.781570456991845E-10-1.2729384164064277E-10i 2.2933062389884342E-9-5.730539791309987E-10i -5.577707250706336E-4 -5.577609328862839E-4 0 3.9863969972825905E-12-9.61279399912619E-13i 4.575199695917211E-12-1.4452534081435506E-12i 3.307421127533591E-10-8.011777825647406E-11i -5.823650767241475E-4 -5.277850568763463E-4 6.7076755661775E-5 6.876242500506723E-11-1.723613542062096E-11i 6.531838212206133E-11-1.7387318649399153E-11i 3.230788449950494E-10-7.779914803206703E-11i -5.924058539090466E-4 -5.368847992362832E-4 6.823325144904696E-5 4.8583673429999664E-12-1.1545617968744414E-12i 4.564042984465266E-12-1.2136795435782674E-12i 2.047019339450926E-11-4.334319784909221E-12i -6.024466310939457E-4 -5.459845415962202E-4 6.938974723631895E-5 1.2551006026136856E-19+1.738183382390264E-20i 1.4984645788861127E-19-3.5591975446645935E-20i 1.964049712003083E-18-1.121186915943239E-19i -4.745321490563065E-4 -5.782069172905826E-4 0 -4.50564221068524E-9+1.2131306188561933E-9i -5.241774474442554E-9+1.2486449691833818E-9i 1.1339457299170545E-7-2.9386127413076564E-8i -5.004955110236665E-4 -5.522339260827061E-4 6....
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This document was uploaded on 01/24/2014.

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