H_75nm_L1_65um_D_10um

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Unformatted text preview: 435462E-7i 1.4579351527672072E-4 -1.5475516802049893E-4 1.2145855145815029E-6 -1.1060052454687779E-8+3.602235873607409E-10i 2.6302335681870677E-7+1.3755202872742378E-7i 1.636674659494656E-6-1.3793135189069521E-7i 1.4660960406242786E-4 -1.5629718433052503E-4 0 6.823340418261418E-9-4.718948196323162E-10i -3.225746729706066E-8-1.9945726915937546E-8i 1.5762602092893128E-6-1.341392831404028E-7i 1.4739199712443827E-4 -1.5499999999999997E-4 0 1.0901412667586276E-8+2.513175089640349E-9i 1.2914658897328133E-7+3.858612865658541E-8i 1.8488734324917377E-6+3.326841119255519E-8i 1.450603248255789E-4 -1.568313696904784E-4 0 4.649016771482259E-9-1.2371065404901138E-9i -3.3815026547603356E-8-1.1368515842255511E-8i 1.5439369279080462E-6-1.6018624801857697E-7i 1.4814861885997826E-4 -1.5670590568879036E-4 0 2.768260432268228E-9-2.586181192313987E-9i -7.870142348042307E-9-7.0196417891270245E-9i 1.5032112465585022E-6-1.5914270590590735E-7i 1.4377386544557223E-4 -1.5617780775775754E-4 1.1381016296618028E-6 -1.1576834866619823E-8-1.566078290486661E-10i 1.0091994406396613E-7+5.525315757276087E-8i 1.5767724337332454E-6-1.6242269191118115E-7i 1.4317765015143454E-4 -1.5690741606564943E-4 0 -4.0948932645331476E-10-4.493571501224328E-9i -2.7333490892119533E-8-7.050043477827006E-9i 1.5387445245965474E-6-1.8077550079894095E-7i 1.4424974811754919E-4 -1.5871369549890098E-4 0 6.47806992770672E-10-2.982644091778508E-9i -7.47812778992274E-9+3.6364460396023924E-9i 1.4563932457072049E-6-2.0053306636590162E-7i 1.487216193585602E-4 -1.5583865350193062E-4 1.7769641302213702E-6 -1.9922744716857225E-8+1.1601497836257805E-10i 1.5465335140532115E-7+7.763871504385038E-8i 1.5050893421551621E-6-1.6391987914149568E-7i 1.4895437050563043E-4 -1.583937074096639E-4 0 2.190557633289375E-9-2.21285984067926E-9i -1.0045447498714203E-8+2.6630157482377542E-9i 1.4234142831693382E-6-1.8289868229218387E-7i 1.5069702956543074E-4 -1.5703782126465942E-4 1.722412284059276E-6 -1.6014048613033447E-8+1.5463638777981438E-9i 9.283067190617235E-8+4.6964176484350346E-8i 1.4348652904123984E-6-1.7421412575444865E-7i 1.515795181766981E-4 -1.5859261234332263E-4 0 1.922352162940103E-9-2.109532922254024E-9i -6.335455550851657E-9+4.209078069361182E-9i 1.384607694359369E-6-1.8253462194379237E-7i 1.4963777486358786E-4 -1.602527501119933E-4 0 3.6480046984742485E-9-1.3246923511826363E-9i -4.929136828543833E-9+4.0391815738952426E-9i 1.3511121050444098E-6-2.0578666784095104E-7i 1.6227052541486283E-4 -1.5855189095743965E-4 1.548956658702636E-6 -1.3951669216617779E-8+1.7665426866003524E-10i 4.771134349135846E-8+2.452879491319002E-8i 1.2597157110681522E-6-1.7306386781976483E-7i 1.6251014148341866E-4 -1.6037528985171832E-4 0 2.106902074680561E-9-1.8993271254374998E-9i -5.587031765225473E-9+3.447548833240312E-9i 1.2152868083177907E-6-1.8548925665821946E-7i 1.6054760495737096E-4 -1.6032516490007478E-4 0 2.024794267643991E-9-1.9936755510994206E-9i -3.6580116961607905E-9+4.520045872886883E-9i 1.2373092785731887E-6-1.8729785218244476E-7i 1.7048...
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This document was uploaded on 01/24/2014.

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