H_75nm_L1_65um_D_10um

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Unformatted text preview: 86747E-7-1.0635739237254405E-7i 3.0794131604803603E-7-1.218817166869826E-7i 3.4116082639615274E-5-7.970719157710144E-6i 1.1889935241867002E-5 4.629054413305644E-6 0 3.627296238205242E-6-1.0432907788556888E-6i 9.2393534874363E-6-2.6113427807559477E-6i 3.0053796975871086E-5-6.734819267271638E-6i 1.1426276214143413E-5 4.792257937815336E-6 7.5E-8 -1.6342945116859585E-6+3.7786356010588353E-7i -5.649257847446939E-6+1.294361654553247E-6i 3.496520753234787E-5-7.792238412592871E-6i 1.1891454404775875E-5 4.62843388358182E-6 7.500000000000002E-8 -2.007350481189567E-6+4.962168449237119E-7i -4.745783170769186E-6+1.1616661762200839E-6i 3.363854682400622E-5-7.413699000263085E-6i 1.8660254037844367E-5 5.0E-6 7.500000000000002E-8 1.039889851217072E-6-3.2070338091545234E-7i -9.760738461151267E-7+2.4351135880834026E-7i 2.3509127850793288E-5-5.865697133941719E-6i 1.613293627117624E-5 6.840431207241042E-7 7.500000000000002E-8 6.083744659850304E-7+3.6572713155573625E-7i 7.063231039499877E-8+3.9235327992524013E-8i 2.788784357430317E-5-6.826728966477999E-6i 1.3376896478955213E-5 2.9715472159468678E-6 0 2.867924836370394E-7-1.2593546572996044E-7i 1.8944194613262477E-7-8.782143263096846E-8i 3.1678381871806865E-5-7.311069448260021E-6i 1.268175691415376E-5 3.571507187557425E-6 0 2.7511994655211027E-7-1.0620809095361332E-7i 2.4649870197610747E-7-9.693540969728503E-8i 3.291469131956846E-5-7.658528356026114E-6i 1.3337930485728518E-5 2.3670986708547166E-6 0 9.216654257553775E-8-7.345295698537451E-8i 2.0734404194283628E-8-3.189669521841409E-8i 3.187935677190458E-5-7.432709101381295E-6i 1.2693038240260698E-5 2.861269898679061E-6 0 1.1454467754775878E-7-8.14561878076641E-8i 5.4645467003110924E-8-5.1241321996984085E-8i 3.299882742026459E-5-7.74399857786208E-6i 1.3559184571410483E-5 2.759808808745623E-6 2.989878972685525E-7 -5.935023377967964E-7+1.5944151244707475E-7i -1.3137672373725036E-7+4.04517052744206E-8i 3.144160252612751E-5-7.251293529350706E-6i 1.5902354875630815E-5 1.624756755551986E-6 7.500000000000002E-8 5.837441055329268E-7+3.643031093084059E-7i 1.6171133042294784E-7+9.57555473135585E-8i 2.8154765822744092E-5-6.889229613068718E-6i 1.5599635968014885E-5 1.2421395120142042E-6 6.397282282284155E-7 -5.725384760451915E-7+5.217429198609303E-7i 2.4441770830487738E-8+7.262706624748654E-8i 2.8826637584176395E-5-6.863962842046668E-6i 1.5438848864821083E-5 2.2267953972451184E-6 7.500000000000002E-8 6.441730353992754E-7+3.9162147700977155E-7i 2.6279115539634264E-7+1.502635874884178E-7i 2.903885250879916E-5-7.00012205700023E-6i 1.5111775911694299E-5 1.8162086700640865E-6 7.500000000000002E-8 7.755912433652853E-7+4.83948562823161E-7i 2.496723702262449E-7+1.7003983100311039E-7i 3.008055914479952E-5-7.026355512973126E-6i 1.6680335450501655E-5 1.1762004561521642E-6 7.500000000000002E-8 3.8971818715026244E-7+2.6837374403886985E-7i 6.971846104271573E-8+4.37146615004331E-8i 2.694872527738459E-5-6.714078058626387E-6i 1.4901248579100102E-5 2.3320489804750856E-6 7.500000000000002E-8 8.207085078112039E-7+4.4558908201...
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This document was uploaded on 01/24/2014.

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