H_75nm_L1_65um_D_10um

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Unformatted text preview: 34801606E-9-4.5061932097499444E-10i -5.650314613034459E-4 5.132749095316258E-4 -1.9873035747613823E-4 -1.9584003597254082E-10+4.8601811119267564E-11i 1.8582527770440403E-10-4.790240921473512E-11i 2.583407339379128E-10-6.134536702133895E-11i -5.906252069839891E-4 4.8458706782192427E-4 -1.3142404108407852E-4 -1.0170802757719186E-9+2.5775429068349044E-10i 8.903005119731911E-10-2.2887513147018652E-10i 2.1186524473012458E-9-5.275369470950935E-10i -6.009870527205503E-4 4.93088595327572E-4 -1.3372972601537815E-4 -1.4178719744384365E-10+3.5215414088407976E-11i 1.212324534874559E-10-3.110151426917013E-11i 2.9876895137182013E-10-7.139740442859332E-11i -4.6480066419504713E-4 5.644081198172257E-4 -2.5756330648643865E-4 -1.4612736947428216E-9+3.6901689769727365E-10i 1.9313976468429625E-9-4.999609427166523E-10i 1.417023293397212E-9-3.512978492297599E-10i -4.7295506181250406E-4 5.743100166561243E-4 -2.620819609862007E-4 -2.0991569701775895E-10+5.1707511112399337E-11i 2.6887966681484787E-10-6.950542596014208E-11i 2.0484621764057743E-10-4.852562064785187E-11i -5.044852656484114E-4 5.552310934580151E-4 -1.9531535935780422E-4 -1.2329945804064933E-9+3.120421118351235E-10i 1.4655576617635027E-9-3.786416586548908E-10i 1.8025043212963973E-9-4.495744910349327E-10i -5.133358843439975E-4 5.649719898344715E-4 -1.9874194460969556E-4 -1.753500668727608E-10+4.3365985454415996E-11i 2.0258810033173268E-10-5.225705084275242E-11i 2.576150113473375E-10-6.175083593754012E-11i -2.567740583118028E-4 6.048969649489241E-4 -4.112198740013267E-4 -1.1029329971488101E-9+2.7077111199158443E-10i 3.05102957256879E-9-7.916102072576726E-10i 1.3882063084483586E-10-2.8134503275766444E-11i -2.6127886635236077E-4 6.155091924041684E-4 -4.1843425775573594E-4 -1.696276069253603E-10+3.9800803731991736E-11i 4.4073404892927507E-10-1.1428130916484504E-10i 2.299790013171064E-11-3.6296864176312897E-12i -1.9852222182391652E-4 5.986271205265424E-4 -4.5074331721301836E-4 -8.708648975900903E-10+2.0913410990235811E-10i 3.2550553728269406E-9-8.447216092467584E-10i -2.6115812735178995E-10+7.341443402603853E-11i -2.0200506782082727E-4 6.091293507112187E-4 -4.5865109470798367E-4 -1.3826315305431317E-10+3.127855276173089E-11i 4.750156678534695E-10-1.2320739549827838E-10i -3.654029100321137E-11+1.119909165881359E-11i -1.341610139962095E-4 5.880017833753355E-4 -4.8702131890804686E-4 -5.50687771917382E-10+1.2478794152812986E-10i 3.3879600598896626E-9-8.79309910527471E-10i -6.406682200796653E-10+1.6944294525199786E-10i -1.36514715996143E-4 5.983176041363063E-4 -4.955655525731003E-4 -9.338331544027776E-11+1.9288837707975766E-11i 4.998874035202855E-10-1.296924110878032E-10i -9.436694409023186E-11+2.5539226543492888E-11i -4.077684737577601E-4 6.073075987841544E-4 -2.565879815351674E-4 -1.2328256034324544E-9+3.1019185031386785E-10i 2.024044088305557E-9-5.241572272275426E-10i 1.419957392145558E-9-3.5456190257318027E-10i -4.149223066307033E-4 6.179621180610693E-4 -2.610895250708721E-4 -1.7988971212333744E-10+4.400299061950801E-11i 2.847867622671...
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This document was uploaded on 01/24/2014.

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