H_75nm_L1_65um_D_10um

1345468996458685e 4 6439417462682209e 6

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Unformatted text preview: 1425E-8-2.6151116675659016E-8i 5.6919437394376686E-8+9.940951390275538E-9i 1.9026234633658417E-6-8.237123937583372E-7i 1.1625412151536087E-4 -5.61408731061686E-5 -4.884730564263475E-6 4.169371355891033E-8-7.556980039030686E-8i 3.490493995492252E-8+2.7399189044921363E-8i 2.0880620180292002E-6-8.236195179361162E-7i 1.2447029797477835E-4 -5.6274489468203595E-5 0 -4.612273212751098E-8-5.128034991466643E-9i 9.08913915571659E-8+2.1326022306120383E-8i 1.7823644602597023E-6-7.852851269412302E-7i 1.173004952853183E-4 -5.37319279535193E-5 0 -1.0023921595474043E-7-2.892660102065889E-8i 9.70597368349542E-8+2.5421181956350458E-8i 2.0079383072273047E-6-8.501002344434498E-7i 1.1255382688409359E-4 -5.166931129533937E-5 0 -1.4668229006459824E-7-4.805270968144159E-8i 1.0195110220991516E-7+2.7661690931037926E-8i 2.1851670919398085E-6-8.967826397981416E-7i 1.0986844658009061E-4 -4.6809791251084054E-5 0 -1.6318666072822305E-7-5.6866617655993225E-8i 1.2934626972798802E-7+3.923877186832146E-8i 2.3332394883748054E-6-9.301311781672299E-7i 1.0278708817405216E-4 -4.598904120764596E-5 0 -2.4992762624005335E-7-9.723737089179588E-8i 1.1171965753296051E-7+3.45260238588683E-8i 2.6460587394020055E-6-1.001014408544004E-6i 1.0567489357947801E-4 -4.937935129054452E-5 -4.007389648446399E-6 -4.709255788559423E-8-1.1911584134114081E-7i 5.4605612122051924E-8+3.625858543151033E-8i 2.5418727522474984E-6-9.33279357645311E-7i 1.1710932070342799E-4 -2.4126941563802443E-5 -5.826681484978616E-6 1.6222464168187998E-7-6.688708720843933E-8i 2.641071659519539E-7+1.1828530750174325E-7i 2.4549751086301024E-6-7.928558514566796E-7i 1.1722637095708206E-4 -2.828216980664761E-5 0 -4.4154945788309417E-8-1.0657331845485195E-8i 3.2240125410915314E-7+1.2143333781128435E-7i 2.304403548782564E-6-8.502080873611012E-7i 9.937289829859914E-5 -5.131574703309015E-5 -6.319653449948118E-6 1.1326858174960726E-8-1.8074137515726112E-7i -7.301415463533828E-9+3.534275773753489E-8i 2.8517466587110293E-6-9.63387930451751E-7i 9.991713365296897E-5 -5.935226510047888E-5 -5.803616238023426E-6 -3.9317230304308194E-8-1.7386515183471624E-7i -3.6866563214123416E-8+2.265942294108575E-8i 2.717878123545794E-6-9.407561997933714E-7i 1.102906989267323E-4 -6.222436702105024E-5 -8.4577692956506E-6 1.1856551464097422E-7-1.3265712711758096E-7i -4.7516356599548986E-8+2.4449882535915055E-8i 2.2707180194113717E-6-8.348182950677632E-7i 1.1443978008438765E-4 -7.815568603096717E-5 -9.75585742022505E-6 1.394699221876841E-7-1.1627530228540527E-7i -1.2042510179537232E-7+5.038981054967151E-9i 1.9968823144155314E-6-7.549480707098062E-7i 1.346952775402495E-4 -5.259407658612221E-5 -9.892925607339303E-6 2.39249306198157E-7-4.931135925517073E-8i 4.853040579210594E-8+3.946850271752896E-8i 1.6737474685978968E-6-6.602978018204592E-7i 1.2109801644900558E-4 -4.753844979657015E-5 0 -5.7178174347333186E-8-1.2077422626875431E-8i 1.4821505094025996E-7+4.441829675016617E-8i 1.9519418128446955E-6-8.244367597133069E-7i 1.2418923488073007E-4 -5.0475618967550825E-5 -8.22352917971936E-6...
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This document was uploaded on 01/24/2014.

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