H_75nm_L1_65um_D_10um

143512980758483e 6 13075010397089588e 6

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Unformatted text preview: 5767805607448E-7i 1.6817091419492472E-4 -4.321306074341823E-6 -1.6249670819549151E-6 3.753930585359369E-8-1.6412109375287611E-9i 1.4293519557477217E-7+6.77501212492569E-8i 1.9119194099345626E-6-2.1862073378303208E-7i 1.6943528407104358E-4 -2.9503193971824707E-6 -1.7271861540657693E-6 3.6459917394377727E-8-2.8973960945665884E-9i 6.60040984888282E-8+3.0927908775992586E-8i 1.8509617029379595E-6-2.2981469140489214E-7i 1.6560192125726872E-4 -3.229439794773454E-6 0 2.7836876065083518E-9-1.1650145296848756E-10i -8.954499087569847E-9-7.081994726467139E-9i 1.9768925655491316E-6-2.130005933945163E-7i 1.6724702662056183E-4 -3.7647700330242556E-6 0 1.919537388771085E-9-5.81621400919416E-10i -4.3363848222494364E-9-6.398379341962496E-10i 2.0151457849285015E-6-1.7216447900897442E-7i 1.6685433626075145E-4 -2.8721028492866796E-6 -1.7868816572256204E-6 3.87637570317082E-8-3.2147627616429234E-9i 6.876141621346263E-8+3.206644436944889E-8i 1.8958819691017205E-6-2.3702850637228877E-7i 1.6518188684287068E-4 1.0971473194065716E-6 0 2.0836579371621833E-9-5.740929040883242E-10i 6.998474346823007E-10+3.121350219888659E-10i 1.923822867538265E-6-2.4246666787776214E-7i 1.631533493844901E-4 3.794834213036094E-7 -1.5847692219325368E-6 3.401254781384524E-8-4.389577411662356E-9i -6.912658188565646E-9-3.313954139507641E-9i 1.9431623722405054E-6-2.567639967369789E-7i 1.6768713098088938E-4 1.4510973757026044E-6 0 1.6562408156056096E-9-7.401750435464441E-10i -1.3887555093473445E-9-6.202809916883383E-10i 1.8759875339440653E-6-2.3673852654462706E-7i 1.671462961801687E-4 1.1841242632530929E-6 -2.23743326328888E-6 4.6550640224029066E-8-4.654529543409185E-9i -2.5052308590077228E-8-1.1520267906290147E-8i 1.855757479502921E-6-2.5162301829645297E-7i 1.6526380894095347E-4 -6.216101546568007E-7 -2.4192652564060346E-6 5.0330269160560916E-8-5.728594116335577E-9i 1.4823021959881264E-8+6.692883036159665E-9i 1.882582787459029E-6-2.600660438742071E-7i 1.6430042280705682E-4 -1.1265673901760778E-6 0 1.5456748042944057E-9-8.371189561310298E-10i -3.694799535457747E-9-1.9005804347229194E-9i 1.9430185911971707E-6-2.435720326171024E-7i 1.6719806337935522E-4 -1.4143503502518585E-6 0 1.7203412502342464E-9-6.958139787828427E-10i -1.5940924889418692E-10-2.437513805417293E-10i 1.8862108527354432E-6-2.3733673099404865E-7i 1.6853025748460893E-4 -6.879284313864439E-7 -1.9982722338991907E-6 4.0961804828763906E-8-4.0894854605773755E-9i 1.1705100251153142E-8+5.309547013798504E-9i 1.8303648288818716E-6-2.482160808014999E-7i 1.6947251792943948E-4 -1.0684604769434789E-6 0 1.7928591981787763E-9-6.548046322001132E-10i -7.033597783302932E-10-4.5565956983186505E-10i 1.8362777213664418E-6-2.3582311388679984E-7i 1.727627945287687E-4 1.4967216411565813E-6 0 1.568481491427095E-9-6.28266104245642E-10i -3.0535576524689343E-10-9.067434003012512E-11i 1.7796807944112973E-6-2.2795076867662832E-7i 1.7036883562954858E-4 1.1199928781835335E-6 0 1.7820365569065676E-9-5.928802314299512E-10i -2.8820268293617073E-9-1.328988758064341E-9i 1.81890324838...
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This document was uploaded on 01/24/2014.

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