H_75nm_L1_65um_D_10um

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Unformatted text preview: E-4 0 1.1661481561472115E-8+3.6983210058279908E-9i 3.5335110181533967E-7+1.6712656301911585E-7i 1.110113988776378E-6-1.4306154095131833E-7i 1.8402278553244743E-4 1.5413739934535647E-4 -1.0907620987423765E-6 1.8336355487051806E-8+9.38604962197834E-10i 2.4429345838001214E-7+1.1200455263432763E-7i 1.149889488854413E-6-1.1049871025703696E-7i 1.794172614572904E-4 1.531586515413061E-4 0 1.2954598984947125E-8+4.332549115601944E-9i 3.769137798469164E-7+1.7795780477164557E-7i 1.1523867334657546E-6-1.4101080601809914E-7i 1.8069366982357546E-4 1.530339658691175E-4 -2.6824997657359476E-6 3.831267526282826E-8+1.5625429080143368E-9i 2.35406324370013E-7+1.0092845088702966E-7i 1.090106284323876E-6-1.6062062258336046E-7i 1.810658739640344E-4 1.5367236847057422E-4 0 7.019656545478272E-9+1.4171280172045368E-9i 3.928332558939756E-7+1.870036134919012E-7i 1.199371146664898E-6-1.0864826263436872E-7i 2.0359782554771325E-4 1.5319291307617095E-4 0 1.4903199389109908E-8+5.675704135950445E-9i 2.2995700618828062E-7+1.1270319504461793E-7i 8.993786106367669E-7-1.3844754986766019E-7i 2.018862246281681E-4 1.5374062541502462E-4 0 1.0833095564859434E-8+3.702447748346102E-9i 2.313636151629472E-7+1.1389825897494628E-7i 9.58379748587142E-7-1.1548408811932187E-7i 1.9671697026498806E-4 1.5373586080109173E-4 0 9.74175674252959E-9+2.989470728256838E-9i 2.7416988521281436E-7+1.3348942345812712E-7i 1.009996121136833E-6-1.1564499374229919E-7i 2.0027765291934273E-4 1.5312751478253564E-4 0 1.4078952355254677E-8+5.189758656132769E-9i 2.584612415403465E-7+1.2602506937687297E-7i 9.452746186287022E-7-1.3211532192101192E-7i 2.0177238164563745E-4 1.5427739878775277E-4 -1.623116271826492E-6 2.479873871095062E-8+2.867453063740751E-9i 1.3930007604307408E-7+6.198657070833735E-8i 9.409645969899542E-7-1.212566151240907E-7i 1.9917855822699796E-4 1.5346348867667777E-4 -1.4945495698960372E-6 2.664779147562122E-8+4.086953803004117E-9i 1.8212632330271725E-7+8.323715466667866E-8i 9.512792068850249E-7-1.317159911014008E-7i 1.9836505731060203E-4 1.5317803210556518E-4 0 1.291674300283631E-8+4.6280675139454E-9i 2.663115472208806E-7+1.291002258723968E-7i 9.536803421034358E-7-1.3713258327155925E-7i 1.9739103279396998E-4 1.5429334655599333E-4 -9.9932013013655E-7 1.8894584325460232E-8+2.5548575012186637E-9i 1.8068345161907486E-7+8.412151794512996E-8i 1.013163086011866E-6-1.066102182108445E-7i 2.2172411055761555E-4 1.5499999999999997E-4 0 3.889379329453241E-9-2.470240087135145E-10i 9.49389452123417E-9-7.287981908937757E-9i 7.729469118746745E-7-9.969371450969287E-8i 2.1999597472421823E-4 1.5499999999999997E-4 0 3.2017260347590635E-9+7.4549294081655E-10i 2.344267892723745E-8+3.822112558050705E-9i 7.997888382670584E-7-9.573546015187572E-8i 2.207320846286767E-4 1.5563317936539387E-4 -1.1572062793950849E-6 1.5312505700951277E-8+6.554050874308674E-10i 2.2526071724892178E-8-7.835648110774942E-10i 7.556428186694336E-7-1.2603144581487905E-7i 2.0561317952795814E-4 1.5312559678629437E-4 0 1.5086266161837763E-8+5.9325365642150935E-9...
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This document was uploaded on 01/24/2014.

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